Enqubweni yokukhiqiza ye-semiconductor wafer yathola izinqubo zokukhiqiza ezithuthukile, cishe izinhlobo ezahlukene ezingama-50 zamagesi ziyadingeka. Amagesi ngokuvamile ahlukaniswe ngamagesi amaningi futhiamagesi akhethekile.

Ukusetshenziswa kwamagesi ku-microelectonline kanye nezimboni ze-semiconductor ukusetshenziswa kwamagesi bekulokhu kudlala indima ebalulekile ezinqubweni ze-semiconductor, ikakhulukazi izinqubo ze-semiconductor zisetshenziswa kabanzi kwizimboni ezahlukahlukene. Kusuka ku-Ulsi, i-TFT-LCD kwimboni yamanje ye-micro-electromechanical (mems), izinqubo ze-semiconductor zisetshenziswa njengezinqubo zokukhiqiza zomkhiqizo, kufaka phakathi ukufakwa okulomile, oxidation, ukufakwa kwe-ion, ukufakwa kwamafilimu, njll.

Isibonelo, abantu abaningi bayazi ukuthi ama-chip enziwe ngesihlabathi, kepha abheka yonke inqubo yokukhiqiza chip, izinto eziningi zidingeka, ezinjengezinto ezihlosiwe, impahla eqondile, igesi ekhethekile, njll. Zibalulekile. Ukupakishwa kokuphela kokuphela nakho kudinga ama-substrates, izisusa, ozimele be-lead, izinto zokubopha, njll. Izinto ezahlukahlukene. Amagesi akhethekile we-elekthronikhi anezindleko zesibili ngobukhulu ezindlekweni zokukhiqiza ze-semiconductor ngemuva kwama-silicon wafers, alandelwa imaski kanye nezithombe.

Ubumsulwa begesi bunethonya elinqumayo ekusebenzeni kwezakhi kanye nesivuno somkhiqizo, kanye nokuphepha kokuhlinzekwa kwegesi kuhlobene nezempilo yabasebenzi kanye nokuphepha kokusebenza kwefekthri. Kungani ubumsulwa begesi bunomthelela omkhulu kangaka emugqeni wenqubo nabasebenzi? Lokhu akuyona ukweqisa, kepha kunqunywa yizimpawu eziyingozi zegesi uqobo.

Ukuhlukaniswa kwamagesi ajwayelekile embonini ye-semiconductor

Igesi ejwayelekile

Igesi ejwayelekile ibizwa nangokuthi i-bulk gesi: Kusho igesi yezimboni enesidingo sokuhlanza okuphansi kunomhlaka 5n kanye nevolumu enkulu. Ingahlukaniswa ngegesi yokwehlukanisa umoya kanye negesi yokwenziwa ngokuya ngezindlela ezahlukahlukene zokulungiselela. I-Hydrogen (H2), i-nitrogen (N2), i-oxygen (O2), i-Aroston (A2), njll;

Igesi ekhethekile

Igesi ekhethekile ibhekisa kugesi yezimboni esetshenziswa emikhakheni ethile futhi inezidingo ezikhethekile zobumsulwa, izinhlobonhlobo, kanye nezakhiwo. ImvamaSih4, PH3, B2H6, A8H3,Hllo, CF4,NH3, POCL3, Sih2Cl2, Siecl3,NH3, I-BCL3, Sif4, CLF3, CO, C2F6, N2O, F2, HF, HBR,I-SF6… njalo njalo.

Izinhlobo zamagesi asetshenzisiwe

Izinhlobo zamagesi akhethekile: Ukuwohloka, okunobuthi, okuvuthayo, ukusekela-ukusekela, inert, njll.
Amagesi we-semiconductor asetshenziswayo asetshenziswa ngokulandelayo:
(i) I-Complocinage / TOXCIC:Hlkwane, BF3, WF6, HBR, Sih2Cl2, NH3, PH3, CL2,I-BCL3...
(ii) evuthayo: H2,Ch4,Sih4, PH3, ASH3, Sih2Cl2, B2H6, CH2F2, CH3F, CO ...
(iii) okuhlangane: O2, CL2, N2O, NF3 ...
(iv) inert: N2,CF4, C2F6,C4f8,I-SF6, CO2,Ne,Kr, Yena ...

Enqubweni ye-Semiconductor Chip Chip, cishe izinhlobo ezingama-50 ezahlukahlukene zamagesi akhethekile (okukhulunywa ngazo njengamagesi akhethekile) zisetshenziswa ku-oxidation, ukufakwa, ukujova, i-etchihography, kanye nezinyathelo zenqubo ephelele zidlula amakhulu. Isibonelo, i-PH3 ne-ASH3 zisetshenziswa njengemithombo ye-phosphorus kanye ne-arsenic in inqubo yokufakwa kwe-Ion, amagesi asuselwa ku-F.

Kulezi zinto ezingenhla, singakwazi ukuqonda ukuthi amagesi amaningi ama-semiconductor ayingozi emzimbeni womuntu. Ikakhulu, amanye amagesi, anjengeSih4, azenzela ukuzinaka. Uma nje zivuza, zizosabela ngobudlova ngomoya-mpilo emoyeni bese ziqala ukushisa; futhi u-Ash3 unobuthi kakhulu. Noma yikuphi ukuvuvukala okuncane kungadala ukulimaza izimpilo zabantu, ngakho-ke izidingo zokuphepha kokwakhiwa kohlelo lokulawula ukusetshenziswa kwamagesi akhethekile aphezulu.

Ama-semiconductors adinga amagesi amsulwa ukuba abe "degrees amathathu"

Ubumsulwa begesi

Okuqukethwe umoya wokungcola kugesi kuvame ukuvezwa njengephesenti lokuhlanzeka kwegesi, njenge-99.9999%. Ngokuvamile, imfuneko yokuhlanzana yamagesi akhethekile kagesi ifinyelela ku-5N-6N-6N, futhi izwakala futhi isilinganiselo sevolumu se-Imputer Atmosphere atmosphere okuqukethwe i-PPM (ingxenye yesigidi), ne-PPT (ingxenye ngayinye). Inkambu ye-Electronic semiconductor inezidingo eziphakeme kakhulu zokuhlanzeka kanye nokuqina kwekhwalithi yamagesi akhethekile, futhi ubumsulwa bamagesi akhethekile ngokuvamile bukhulu kune-6n.

Ukoma

Okuqukethwe kwamanzi okulandela igesi, noma emanzi, kuvame ukuvezwa ku-Dew Point, njenge-Atmospheric Dew Point -70 ℃.

Ubunono

Inani lezinhlayiya ezingcolisiwe kugesi, izinhlayiya ezinosayizi we-μm, zivezwa ukuthi zingaki izinhlayiya / m3. Ngomoya ocindezelwe, kuvame ukuvezwa ku-MG / M3 yamasabelo aqinile angenakugwenywa, okubandakanya okuqukethwe uwoyela.