Enqubweni yokukhiqiza ama-semiconductor wafer foundries anezinqubo zokukhiqiza ezithuthuke kakhulu, cishe izinhlobo ezingama-50 zamagesi ziyadingeka. Amagesi ngokuvamile ahlukaniswe amagesi amaningi kanyeamagesi akhethekile.

Ukusetshenziswa kwamagesi ezimbonini ze-microelectronics kanye ne-semiconductor Ukusetshenziswa kwamagesi bekulokhu kunendima ebalulekile ezinkambisweni ze-semiconductor, ikakhulukazi izinqubo ze-semiconductor zisetshenziswa kabanzi ezimbonini ezihlukahlukene. Kusuka ku-ULSI, TFT-LCD kuya embonini yamanje ye-micro-electromechanical (MEMS), izinqubo ze-semiconductor zisetshenziswa njengezinqubo zokukhiqiza umkhiqizo, okuhlanganisa ukufakwa okomile, i-oxidation, ukufakwa kwe-ion, ukufakwa kwefilimu encane, njll.

Isibonelo, abantu abaningi bayazi ukuthi ama-chips enziwe ngesihlabathi, kodwa uma ubheka yonke inqubo yokukhiqiza ama-chip, kudingeka izinto eziningi ezifana ne-photoresist, uketshezi lokupholisha, izinto ezihlosiwe, igesi ekhethekile, njll. Ukupakishwa kwangemuva nakho kudinga ama-substrates, izithameli, amafreyimu omthofu, izinto zokubopha, njll. zezinto ezihlukahlukene. Amagesi akhethekile we-elekthronikhi ayimpahla yesibili ngobukhulu ezindlekweni zokukhiqiza ze-semiconductor ngemuva kwama-silicon wafers, alandelwa imaski nama-photoresists.

Ukuhlanzeka kwegesi kunomthelela omkhulu ekusebenzeni kwengxenye kanye nesivuno somkhiqizo, futhi ukuphepha kokunikezwa kwegesi kuhlobene nempilo yabasebenzi kanye nokuphepha kokusebenza kwefekthri. Kungani ukuhlanzeka kwegesi kunomthelela omkhulu kangaka kumugqa wenqubo kanye nabasebenzi? Lokhu akulona ihaba, kodwa kunqunywa izici eziyingozi zegesi ngokwayo.

Ukuhlukaniswa kwamagesi ajwayelekile embonini ye-semiconductor

Igesi Ejwayelekile

Igesi evamile ibizwa nangokuthi igesi eyinqwaba: ibhekisela kugesi yezimboni enesidingo sokuhlanzeka esingaphansi kuka-5N kanye nevolumu enkulu yokukhiqiza nokuthengisa. Ingahlukaniswa igesi yokuhlukanisa umoya kanye negesi yokwenziwa ngokwezindlela ezihlukene zokulungiselela. I-Hydrogen (H2), i-nitrogen (N2), i-oxygen (O2), i-argon (A2), njll;

Igesi Elikhethekile

Igesi ekhethekile isho igesi yezimboni esetshenziswa emikhakheni ethile futhi enezidingo ezikhethekile zokuhlanzeka, ukuhlukahluka, kanye nezakhiwo. IkakhulukaziSiH4, PH3, B2H6, A8H3,HCL, CF4,NH3, POCL3, SIH2CL2, SIHCL3,NH3, BCL3, SIF4, CLF3, CO, C2F6, N2O, F2, HF, HBR,SF6… njalo njalo.

Izinhlobo zamagesi Spicial

Izinhlobo zamagesi akhethekile: ezonakalisayo, ezinobuthi, ezivuthayo, ezisekela ukuvutha, ezingenasici, njll.
Amagesi e-semiconductor asetshenziswa ngokujwayelekile ahlukaniswa kanje:
(i) Okulimazayo/okunobuthi:I-HCl,BF3, WF6,HBr,SiH2Cl2,NH3,PH3,Cl2,BCl3…
(ii) Okuvutha umlilo: H2,I-CH4,SiH4,PH3,AsH3,SiH2Cl2,B2H6,CH2F2,CH3F,CO...
(iii) Okuvuthayo: O2, Cl2, N2O, NF3...
(iv) Inert: N2,CF4,C2F6,C4F8,SF6CO2,Ne,Kr, Yena…

Enqubweni yokukhiqiza ama-semiconductor chip, cishe izinhlobo ezingama-50 zamagesi akhethekile (okubhekiselwa kuwo njengamagesi akhethekile) asetshenziswa ekuhlanganiseni, ekuhlukaniseni, ekufakeni, ekufakeni, ekufakweni, komjovo, kwi-photolithography nezinye izinqubo, futhi izinyathelo zenqubo ephelele zidlula amakhulu. Isibonelo, i-PH3 ne-ASH3 isetshenziswa njengemithombo ye-phosphorus ne-arsenic enqubweni yokufakelwa kwe-ion, amagesi asekelwe ku-F CF4, CHF3, SF6 namagesi e-halogen CI2, BCI3, HBr avame ukusetshenziswa enqubweni yokuhlanganisa, i-SiH4, NH3, N2O inqubo yefilimu yokubeka, F2/Kr/Ne, Kr/Ne kunqubo ye-photolithography.

Kusukela kulezi zici ezingenhla, singaqonda ukuthi amagesi amaningi e-semiconductor ayingozi emzimbeni womuntu. Ikakhulukazi, amanye amagesi, njenge-SiH4, ayaziqhumisa ngokwawo. Uma nje zivuza, zizosabela ngobudlova nge-oxygen emoyeni futhi ziqale ukushisa; futhi i-ASH3 inobuthi obukhulu. Noma yikuphi ukuvuza okuncane kungase kubangele ukulimala ezimpilweni zabantu, ngakho-ke izidingo zokuphepha zedizayini yokulawula ukusetshenziswa kwamagesi akhethekile ziphezulu kakhulu.

Ama-semiconductors adinga amagesi ahlanzekile ukuze abe "namadigri amathathu"

Ukuhlanzeka kwegesi

Okuqukethwe komkhathi wokungcola egesi kuvame ukuvezwa njengephesenti lokuhlanzeka kwegesi, njenge-99.9999%. Ngokuvamile, isidingo sokuhlanzeka kwamagesi akhethekile we-elekthronikhi sifinyelela ku-5N-6N, futhi sivezwa ngesilinganiso somthamo wokuqukethwe komkhathi wokungcola ppm (ingxenye ngesigidi), ppb (ingxenye ngebhiliyoni ngalinye), kanye ne-ppt (ingxenye ngethriliyoni ngayinye). Inkambu ye-semiconductor ye-elekthronikhi inezidingo eziphakeme kakhulu zokuhlanzeka nokuzinza kwekhwalithi yamagesi akhethekile, futhi ubumsulwa bamagesi akhethekile kagesi ngokuvamile bukhulu kuno-6N.

Ukoma

Okuqukethwe kwamanzi okulandela umkhondo kugesi, noma ubumanzi, kuvame ukuvezwa endaweni yamazolo, njengendawo yamazolo esemkhathini -70℃.

Inhlanzeko

Inani lezinhlayiya ezingcolisayo kugesi, izinhlayiya ezinosayizi wezinhlayiyana ongu-µm, zivezwa ngokuthi zingaki izinhlayiya/M3. Ngomoya ocindezelwe, ngokuvamile uvezwa ngo-mg/m3 wezinsalela eziqinile ezingagwemeki, okufaka phakathi uwoyela.