Enqubweni yokukhiqiza yezindawo zokukhiqiza ze-semiconductor wafer ezinezinqubo zokukhiqiza ezithuthukisiwe, kudingeka izinhlobo ezahlukene zamagesi ezingaba ngu-50. Amagesi ngokuvamile ahlukaniswe ngamagesi amakhulu kanyeamagesi akhethekile.

Ukusetshenziswa kwamagesi embonini yama-microelectronics kanye ne-semiconductor Ukusetshenziswa kwamagesi bekulokhu kudlala indima ebalulekile ezinqubweni ze-semiconductor, ikakhulukazi izinqubo ze-semiconductor zisetshenziswa kabanzi ezimbonini ezahlukahlukene. Kusukela ku-ULSI, TFT-LCD kuya embonini yamanje ye-micro-electromechanical (MEMS), izinqubo ze-semiconductor zisetshenziswa njengezinqubo zokukhiqiza umkhiqizo, kufaka phakathi i-dry etching, i-oxidation, i-ion implantation, i-thin film deposition, njll.

Isibonelo, abantu abaningi bayazi ukuthi ama-chip enziwe ngesihlabathi, kodwa uma bebheka yonke inqubo yokukhiqizwa kwama-chip, kudingeka izinto ezengeziwe, njenge-photoresist, i-polishing liquid, izinto eziqondiwe, igesi ekhethekile, njll. zibalulekile. Ukupakisha kwangemuva kudinga futhi ama-substrate, ama-interposer, amafreyimu e-lead, izinto zokubopha, njll. zezinto ezahlukahlukene. Amagesi akhethekile e-elekthronikhi ayizinto zesibili ngobukhulu ezindleleni zokukhiqiza ze-semiconductor ngemuva kwama-silicon wafers, kulandelwe ama-masks nama-photoresists.

Ubumsulwa begesi bunethonya elibalulekile ekusebenzeni kwezingxenye kanye nokukhiqizwa komkhiqizo, futhi ukuphepha kokunikezwa kwegesi kuhlobene nempilo yabasebenzi kanye nokuphepha kokusebenza kwefektri. Kungani ubumsulwa begesi bunomthelela omkhulu kangaka emgqeni wenqubo kanye nabasebenzi? Lokhu akulona ihaba, kodwa kunqunywa izici eziyingozi zegesi uqobo.

Ukuhlukaniswa kwamagesi avamile embonini ye-semiconductor

Igesi Ejwayelekile

Igesi evamile ibizwa nangokuthi igesi enkulu: ibhekisela kugesi yezimboni enesidingo sokuhlanzeka esingaphansi kuka-5N kanye nomthamo omkhulu wokukhiqiza nokuthengisa. Ingahlukaniswa ibe yigesi yokuhlukanisa umoya kanye negesi yokwenziwa ngokwezindlela ezahlukene zokulungiselela. I-Hydrogen (H2), i-nitrogen (N2), i-oxygen (O2), i-argon (A2), njll.;

Igesi Ekhethekile

Igesi ekhethekile ibhekisela kugesi yezimboni esetshenziswa emikhakheni ethile futhi inezidingo ezikhethekile zokuhlanzeka, ukuhlukahluka, kanye nezakhiwo. NgokuyinhlokoI-SiH4, PH3, B2H6, A8H3,I-HCL, CF4,I-NH3, POCL3, SIH2CL2, SIHCL3,I-NH3, I-BCL3, SIF4, CLF3, CO, C2F6, N2O, F2, HF, HBR,SF6… njalo njalo.

Izinhlobo zamagesi e-Spical

Izinhlobo zamagesi akhethekile: aqothulayo, anobuthi, avuthayo, asekela ukusha, angasebenzi, njll.
Amagesi e-semiconductor asetshenziswa kakhulu ahlukaniswa kanje:
(i) Okulimazayo/okunobuthi:I-HCl、BF3、WF6、HBr、SiH2Cl2、NH3、PH3、Cl2、I-BCl3…
(ii) Okungasha: H2、CH4、I-SiH4,PH3,AsH3,SiH2Cl2,B2H6,CH2F2,CH3F,CO...
(iii) Okuvuthayo: O2、Cl2、N2O、NF3…
(iv) Okungangeni: N2,CF4、C2F6、C4F8、SF6、CO2、Ne、Kr、U…

Enkambisweni yokukhiqizwa kwama-chip e-semiconductor, izinhlobo ezahlukene zamagesi akhethekile ezingaba ngu-50 (okubizwa ngokuthi amagesi akhethekile) zisetshenziswa ekufakweni kwe-oxidation, ukusabalala, ukufakwa, ukucheba, ukujova, i-photolithography nezinye izinqubo, futhi izinyathelo zenqubo zizonke zidlula amakhulu. Isibonelo, i-PH3 ne-AsH3 zisetshenziswa njengemithombo ye-phosphorus ne-arsenic enkambisweni yokufaka ama-ion, amagesi asekelwe ku-F i-CF4, i-CHF3, i-SF6 kanye namagesi e-halogen i-CI2, i-BCI3, i-HBr avame ukusetshenziswa enkambisweni yokucheba, i-SiH4, i-NH3, i-N2O enkambisweni yefilimu yokufaka, i-F2/Kr/Ne, i-Kr/Ne enkambisweni ye-photolithography.

Kusukela kulezi zici ezingenhla, singaqonda ukuthi amagesi amaningi e-semiconductor ayingozi emzimbeni womuntu. Ikakhulukazi, amanye amagesi, njenge-SiH4, ayazishisa wona. Uma nje evuza, azosabela ngamandla nomoya-mpilo emoyeni bese eqala ukusha; kanti i-ASH3 inobuthi obukhulu. Noma yikuphi ukuvuza okuncane kungalimaza izimpilo zabantu, ngakho-ke izidingo zokuphepha komklamo wohlelo lokulawula ukusetshenziswa kwamagesi akhethekile ziphakeme kakhulu.

Ama-semiconductor adinga amagesi ahlanzekile kakhulu ukuze abe “nama-degree amathathu”

Ubumsulwa begesi

Okuqukethwe komkhathi wokungcola kugesi kuvame ukuvezwa njengephesenti lokuhlanzeka kwegesi, njengo-99.9999%. Ngokuvamile, isidingo sokuhlanzeka kwamagesi akhethekile kagesi sifinyelela ku-5N-6N, futhi sibonakaliswa yisilinganiso sevolumu sokuqukethwe komkhathi wokungcola i-ppm (ingxenye ngesigidi), i-ppb (ingxenye ngebhiliyoni), kanye ne-ppt (ingxenye nge-trillion). Insimu ye-semiconductor kagesi inezidingo eziphakeme kakhulu zokuhlanzeka kanye nokuqina kwekhwalithi yamagesi akhethekile, kanti ukuhlanzeka kwamagesi akhethekile kagesi ngokuvamile kukhulu kune-6N.

Ukoma

Okuqukethwe kwamanzi amancane kugesi, noma ubumanzi, kuvame ukuvezwa endaweni yamazolo, njenge-atmospheric dew point -70℃.

Ukuhlanzeka

Inani lezinhlayiya ezingcolisayo kugesi, izinhlayiya ezinobukhulu bezinhlayiya obuyi-µm, livezwa ngokuthi zingaki izinhlayiya/M3. Emoyeni ocindezelwe, ngokuvamile livezwa ku-mg/m3 wezinsalela eziqinile ezingenakugwenywa, okuhlanganisa nokuqukethwe uwoyela.