I-Octafluorocyclobutane (C4F8)

Imingcele Yezobuchwepheshe

I-Octafluorocyclobutane iyikhemikhali, i-perfluorinated derivative ye-cyclobutane, futhi ifomula yayo yamakhemikhali yi-C4F8.Igesi engenambala, engenaphunga, engashi.Izinzile ngokwemvelo futhi ayinabo ubuthi.Uma kwenzeka ukushisa okuphezulu, ukucindezelwa kwangaphakathi kwesitsha kuzokwanda, futhi kuzoba nengozi yokuqhekeka nokuqhuma.Umkhiqizo wokushiswa (ukubola) yi-hydrogen fluoride.I-Octafluorocyclobutane izinzile kakhulu futhi ayiphenduli nezinye izinto ngaphansi kwezimo ezijwayelekile.Isitsha sokugcina nokusabela singenziwa ngensimbi eyinsimbi nensimbi engagqwali ku-120 ° C, futhi insimbi ingasetshenziswa ku-175 ° C.Uma idlula ku-400°C, Izinto ze-Inconel ezifana ne-nickel neplatinamu nazo zingalimala kancane.Ku-500 ° C, lezi zinsiza zinomthelela omkhulu ekuboleni.Emazingeni okushisa aphezulu (600°C), i-octafluorocyclobutane ingabola ibe yikhabhoni, i-carbon tetrafluoride nezinhlanganisela ezinobuthi.I-Octafluorocyclobutane inohlu olubanzi kakhulu lwezinhlelo zokusebenza.Eminyakeni yamuva nje, ibisetshenziswa kabanzi njengesiqandisi esikhundleni sezinhlanganisela ezingavunyelwe ze-chlorofluorocarbon.Ngaphezu kwalokho, ibuye isetshenziswe ngokujwayelekile emithonjeni yokuvikela igesi, izincibilikisi, izifutho, ama-ejenti akhipha amagwebu, kanye nezinsimbi zesekethe ezinkulu., Uketshezi olusebenzayo lwephampu yokushisa nezinto zokusetshenziswa zokukhiqizwa kwe-C2F4 ne-C3F6 monomers.I-high-purity octafluorocyclobutane (ngaphezulu kuka-5N) isetshenziswa njenge-etching agent kanye ne-ejenti yokuhlanza yamasekhethi e-VLSI.Ngenxa yezakhiwo zayo ezizinzile, ukungabi nobuthi, amandla okunciphisa i-ozone (i-ODP), kanye nokufakwa kahle, i-octafluorocyclobutane iye yasetshenziswa kabanzi emikhakheni yezobuchwepheshe efana nokufakwa kwe-voltage ephezulu, ukuhlanza nokufaka, kanye nokwelashwa kwe-plasma eminyakeni yamuva.Ukusabela okuphuthumayo ekuvuzeni: gqoka amathuluzi okuphefumula azimele kanye nezingubo zokusebenza.Sika umthombo wegesi.I-ventilation kanye ne-convection, i-dilution kanye nokusabalalisa.Hambisa isitsha esivuzayo endaweni evulekile futhi unake umoya omncane.Iziqukathi ezivuzayo ngeke zisasetshenziswa, futhi kufanele ziphathwe ngobuchwepheshe ukuze kukhishwe igesi esele.

Isicelo:

① Imboni Yokudla:

isetshenziswa kakhulu njenge-ejenti yokufafaza embonini yokudla, efrijini.

② Imboni Yezogesi:

i-enchant yesekethe ehlanganisiwe, iphinde yasetshenziswa njengenhlanganisela ye-dielectric ne-sf6, kanye nosizo lwe-polymerization lwenhlanganisela e-fluorinated.

Iphakheji evamile:

Inzuzo:

① Ngaphezu kweminyaka eyishumi emakethe;

②ISO umenzi wesitifiketi;

③Ukulethwa okusheshayo;

④Umthombo wezinto ezingavuthiwe ozinzile;

⑤Isistimu yokuhlaziya eku-inthanethi yokulawula ikhwalithi kuso sonke isinyathelo;

⑥Isidingo esiphezulu kanye nenqubo yokucophelela yokuphatha isilinda ngaphambi kokugcwalisa;