I-Octafluorocyclobutane (C4F8)

Incazelo emfushane:

I-Octafluorocyclobutane C4F8, ukuhlanzeka kwegesi: 99.999%, evame ukusetshenziswa njenge-aerosol propellant yokudla kanye negesi ephakathi. Ivame ukusetshenziswa ku-semiconductor PECVD (Plasma Enhance. Chemical Vapor deposition) inqubo, i-C4F8 isetshenziswa esikhundleni se-CF4 noma i-C2F6, esetshenziswa njengokuhlanza igesi kanye nenqubo ye-semiconductor etching gas.


Imininingwane Yomkhiqizo

Omaka bomkhiqizo

Imingcele Yezobuchwepheshe

Into

 

 

I-Octafluorocyclobutaneokuqukethwe

≥99.999

≥99.90

Umoya-mpilo

≤5ppm

≤0.0020%

Umswakama

≤2ppm

≤0.0020%

I-Octafluorocyclobutaneiyikhemikhali, i-perfluorinated derivative ye-cyclobutane, futhi ifomula yayo yamakhemikhali ithi C4F8. Igesi engenambala, engenaphunga, engashi. Izinzile ngokwemvelo futhi ayinabo ubuthi. Uma kwenzeka ukushisa okuphezulu, ukucindezelwa kwangaphakathi kwesitsha kuzokwanda, futhi kuzoba nengozi yokuqhekeka nokuqhuma. Umkhiqizo wokushiswa (ukubola) yi-hydrogen fluoride. I-Octafluorocyclobutane izinzile kakhulu futhi ayiphenduli nezinye izinto ngaphansi kwezimo ezijwayelekile. Isitsha sokugcina nokusabela singenziwa ngensimbi eyinsimbi nensimbi engagqwali ku-120 ° C, futhi insimbi ingasetshenziswa ku-175 ° C. Uma idlula ku-400°C, Izinto ze-Inconel ezifana ne-nickel neplatinamu nazo zingalimala kancane. Ku-500°C, lezi zinto ezisetshenziswayo zinomthelela wokubola. Emazingeni okushisa aphezulu (600 ° C), i-octafluorocyclobutane ingabola ibe yikhabhoni, i-carbon tetrafluoride kanye nezinhlanganisela ezinobuthi. I-Octafluorocyclobutane inohlu olubanzi kakhulu lwezinhlelo zokusebenza. Eminyakeni yamuva nje, ibisetshenziswa kabanzi njengesiqandisi esikhundleni sezinhlanganisela ezingavunyelwe ze-chlorofluorocarbon. Ngaphezu kwalokho, ibuye isetshenziswe ngokujwayelekile emithonjeni yokuvikela igesi, izincibilikisi, izifutho, ama-ejenti akhipha amagwebu, nezinsimbi ezinkulu zesekethe. , Uketshezi olusebenzayo lwepompo lokushisa kanye nezinto zokusetshenziswa zokukhiqiza ama-monomers e-C2F4 ne-C3F6. I-high-purity octafluorocyclobutane (ngaphezulu kuka-5N) isetshenziswa njenge-etching agent kanye ne-ejenti yokuhlanza yamasekhethi e-VLSI. Ngenxa yezindawo zayo ezizinzile, ukungabi nobuthi, amandla okunciphisa i-ozone (i-ODP), kanye nokufakwa kahle, i-octafluorocyclobutane iye yasetshenziswa kabanzi emikhakheni yezobuchwepheshe efana nokufakwa kwe-voltage ephezulu, ukuhlanza nokufaka, kanye nokwelashwa kwe-plasma eminyakeni yamuva. Ukusabela okuphuthumayo ekuvuzeni: gqoka amathuluzi okuphefumula azimele kanye nezingubo zokusebenza. Sika umthombo wegesi. I-ventilation kanye ne-convection, i-dilution kanye nokusabalalisa. Hambisa isitsha esivuzayo endaweni evulekile futhi unake umoya omncane. Iziqukathi ezivuzayo ngeke zisasetshenziswa, futhi kufanele ziphathwe ngobuchwepheshe ukuze kukhishwe igesi esele.

Isicelo:

① Imboni Yokudla:

isetshenziswa kakhulu njenge-ejenti yokufafaza embonini yokudla, efrijini.

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② Imboni Yezogesi:

i-enchant yesekethe ehlanganisiwe, iphinde yasetshenziswa njengengxube ye-dielectric ne-sf6, kanye nosizo lwe-polymerization lwenhlanganisela e-fluorinated.

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Iphakheji evamile:

Umkhiqizo

I-C4F8-Octafluorocyclobutane

Usayizi Wephakheji

47Ltr Isilinda

926Ltr isilinda

Ukugcwalisa Isisindo Esiphelele/Cyl

45Kgs

1000kgs

I-QTY Ilayishwe ku-20'Container

250 Cyls

14 Cyls

Ingqikithi Yesisindo

11.25 amathani

14 amathani

Isisindo se-Cylinder Tare

50Kgs

500kgs

Ivalvu

I-DISS716

Inzuzo:

① Ngaphezu kweminyaka eyishumi emakethe;

②ISO umenzi wesitifiketi;

③Ukulethwa okusheshayo;

④Umthombo wezinto ezingavuthiwe ozinzile;

⑤Isistimu yokuhlaziya eku-inthanethi yokulawula ikhwalithi kuso sonke isinyathelo;

⑥Isidingo esiphezulu kanye nenqubo yokucophelela yokuphatha isilinda ngaphambi kokugcwalisa;


  • Okwedlule:
  • Olandelayo:

  • Bhala umyalezo wakho lapha futhi usithumelele wona