YiniI-carbon tetrafluoride? Kuyini ukusetshenziswa?
Ikhabhoni tetrafluoride, eyaziwa nangokuthi i-tetrafluoromethane, ithathwa njengenhlanganisela ye-inorganic. Isetshenziselwa inqubo yokufaka i-plasma yamasekethe ahlukahlukene ahlanganisiwe, futhi isetshenziswa njengegesi ye-laser nesiqandisi. Izinzile ngaphansi kokushisa okuvamile nokucindezela, kodwa kuyadingeka ukugwema ukuthintana nama-oxidants aqinile, izinto ezivuthayo noma ezivuthayo. I-Carbon tetrafluoride iyigesi engashi. Uma ihlangabezana nokushisa okuphezulu, kuzokwenza ukuthi umfutho wangaphakathi wesitsha ukhule, futhi kunengozi yokuqhekeka nokuqhuma. Imvamisa ingasebenzisana kuphela ne-liquid ammonia-sodium metal reagent ekamelweni lokushisa.
Ikhabhoni tetrafluoridenjengamanje iyigesi elikhulu kunawo wonke le-plasma etching elisetshenziswa embonini ye-microelectronics. Ingasetshenziswa kabanzi ekufakweni kwe-silicon, i-silicon dioxide, ingilazi ye-phosphosilicate nezinye izinto zefilimu ezincane, ukuhlanza ubuso bemishini kagesi, ukukhiqizwa kwamaseli elanga, ubuchwepheshe be-laser, ukufakwa kwegesi kwesigaba, isiqandisi esisezingeni eliphansi, ama-ejenti okubona ukuvuza, kanye nezinto zokuhlanza ekukhiqizeni isekethe ephrintiwe zinenani elikhulu lezinhlelo zokusebenza.
Isikhathi sokuthumela: Nov-01-2021
