Ubuchwepheshe bokuqopha okomile bungenye yezinqubo ezibalulekile. Igesi yokuqopha okomile iyinto ebalulekile ekukhiqizweni kwe-semiconductor kanye nomthombo obalulekile wegesi wokuqopha i-plasma. Ukusebenza kwayo kuthinta ngqo ikhwalithi kanye nokusebenza komkhiqizo wokugcina. Lesi sihloko sabelana kakhulu ngokuthi yimaphi amagesi okuqopha asetshenziswa kakhulu enqubweni yokuqopha okomile.
Amagesi asekelwe ku-fluorine: njengei-carbon tetrafluoride (CF4), i-hexafluoroethane (C2F6), i-trifluoromethane (CHF3) kanye ne-perfluoropropane (C3F8). Lawa magesi angakhiqiza ngempumelelo ama-fluoride aguquguqukayo lapho eqopha ama-silicon nama-silicon compounds, ngaleyo ndlela asuse izinto.
Amagesi asekelwe ku-chlorine: njenge-chlorine (Cl2),i-boron trichloride (BCl3)kanye ne-silicon tetrachloride (SiCl4). Amagesi asekelwe ku-chlorine anganikeza ama-ion e-chloride ngesikhathi senqubo yokuqopha, okusiza ukuthuthukisa izinga lokuqopha kanye nokukhetha.
Amagesi asekelwe ku-bromine: njenge-bromine (Br2) kanye ne-bromine iodide (IBr). Amagesi asekelwe ku-bromine anganikeza ukusebenza okungcono kokugoba ezinqubweni ezithile zokugoba, ikakhulukazi lapho kugoba izinto eziqinile njenge-silicon carbide.
Amagesi asekelwe ku-nitrogen kanye ne-oxygen: njenge-nitrogen trifluoride (NF3) kanye ne-oxygen (O2). Lawa magesi avame ukusetshenziselwa ukulungisa izimo zokusabela enkambisweni yokuqopha ukuze kuthuthukiswe ukukhetha kanye nokuqondisa kokuqopha.
Lawa magesi afinyelela ukugcaba okunembile kobuso bezinto ezibonakalayo ngokuhlanganiswa kokugcaba ngokomzimba kanye nokusabela kwamakhemikhali ngesikhathi sokugcaba nge-plasma. Ukukhetha igesi yokugcaba kuncike ohlotsheni lwezinto ezizogcaba, izidingo zokukhetha zokugcaba, kanye nesilinganiso sokugcaba esifiselekayo.
Isikhathi sokuthunyelwe: Feb-08-2025
