I-elekthronikhiamagesi akhethekileziyigatsha elibalulekile lamagesi akhethekile. Zingena cishe kuzo zonke izixhumanisi zokukhiqizwa kwe-semiconductor futhi ziyizinto zokusetshenziswa ezingabalulekile zokukhiqiza izimboni ze-elekthronikhi njengamasekethe ahlanganisiwe amakhulu kakhulu, amadivaysi okubonisa amaphaneli ayisicaba, namaseli elanga.

Kubuchwepheshe be-semiconductor, amagesi aqukethe i-fluorine asetshenziswa kakhulu. Njengamanje, emakethe yegesi kagesi yomhlaba wonke, amagesi e-fluorine aqukethe cishe ama-30% engqikithi. Amagesi kagesi ane-fluorine ayingxenye ebalulekile yamagesi e-elekthronikhi akhethekile emkhakheni wezinto zolwazi lwe-elekthronikhi. Asetshenziswa kakhulu njengama-ejenti okuhlanza kanye nama-etching agents, futhi angasetshenziswa njengama-dopants, izinto zokwakha ifilimu, njll. Kulesi sihloko, umbhali uzothatha ukuthi uqonde amagesi ajwayelekile aqukethe i-fluorine.

Okulandelayo amagesi aqukethe i-fluorine avame ukusetshenziswa

I-Nitrogen trifluoride (NF3): Igesi esetshenziselwa ukuhlanza nokukhipha amadiphozithi, ngokuvamile asetshenziselwa ukuhlanza amagumbi okusabela nezindawo zokusebenza.

I-Sulfur hexafluoride (SF6): I-ejenti ye-fluorinating esetshenziswa ezinqubweni zokubeka i-oxide kanye negesi evikelayo yokugcwalisa imidiya yokuvikela.

IHydrogen fluoride (HF): Isetshenziselwa ukususa ama-oxide ebusweni be-silicon nanjenge-etchant yokunamathisela i-silicon nezinye izinto.

I-Nitrogen fluoride (NF): Isetshenziselwa ukuqopha izinto ezifana ne-silicon nitride (SiN) ne-aluminium nitride (AlN).

I-Trifluoromethane (CHF3) kanyei-tetrafluoromethane (CF4): Isetshenziselwa ukufaka izinto ze-fluoride ezifana ne-silicon fluoride ne-aluminium fluoride.

Kodwa-ke, amagesi aqukethe i-fluorine anezingozi ezithile, okuhlanganisa ubuthi, ukugqwala, nokuvutha.

Ubuthi

Amanye amagesi aqukethe i-fluorine anobuthi, njenge-hydrogen fluoride (HF), umhwamuko wawo ocunula kakhulu esikhumbeni nasemgudwini wokuphefumula futhi uyingozi empilweni yomuntu.

Ukugqwala

IHydrogen fluoride namanye ama-fluoride agqwala kakhulu futhi angabangela umonakalo omkhulu esikhumbeni, emehlweni nasemgudwini wokuphefumula.

Ukuvutha

Amanye ama-fluoride ayakwazi ukuvutha futhi ahlangana nomoya-mpilo noma amanzi emoyeni ukuze akhiphe ukushisa okunamandla namagesi anobuthi, angabangela umlilo noma ukuqhuma.

Ingozi yomfutho ophezulu

Amanye amagesi e-fluorinated aqhuma ngaphansi kwengcindezi ephezulu futhi adinga ukunakekelwa okukhethekile lapho esetshenziswa futhi egcinwa.

Umthelela endaweni

Amagesi aqukethe i-fluorine anesikhathi sokuphila esiphezulu somkhathi kanye namagugu e-GWP, anomthelela olimazayo kungqimba lwe-ozone emkhathini futhi angabangela ukufudumala kwembulunga yonke kanye nokungcoliswa kwemvelo.

Ukusetshenziswa kwamagesi emikhakheni esafufusa efana ne-electronics kuyaqhubeka nokujula, okuletha inani elikhulu lesidingo esisha samagesi ezimboni. Ngokusekelwe enanini elikhulu lamandla amasha okukhiqiza ezingxenye ezinkulu ze-elekthronikhi ezifana nama-semiconductors namaphaneli wokubonisa ezweni laseChina eminyakeni embalwa ezayo, kanye nesidingo esinamandla sokushintshaniswa kwamanye amazwe izinto zamakhemikhali e-elekthronikhi, imboni yasekhaya yegesi kagesi izongenisa. izinga lokukhula eliphezulu.