Igesi ekhethekile ye-elekthronikhi esetshenziswa kakhulu - i-nitrogen trifluoride

Amagesi kagesi akhethekile aqukethe i-fluorine ahlanganisai-sulphur hexafluoride (SF6)i-tungsten hexafluoride (WF6),i-carbon tetrafluoride (CF4), i-trifluoromethane (CHF3), i-nitrogen trifluoride (NF3), i-hexafluoroethane (C2F6) ne-octafluoropropane (C3F8).

Ngokuthuthuka kwe-nanotechnology kanye nentuthuko enkulu yemboni yezogesi, isidingo sayo sizokhula usuku nosuku. I-Nitrogen trifluoride, njengegesi ye-elekthronikhi ebaluleke kakhulu futhi esetshenziswa kakhulu kunawo wonke ekukhiqizeni nasekucubunguleni amaphaneli nama-semiconductors, inendawo yemakethe ebanzi.

Njengohlobo lwegesi ekhethekile equkethe i-fluorine,i-nitrogen trifluoride (NF3)iwumkhiqizo wegesi okhethekile we-elekthronikhi onamandla amakhulu emakethe. Ayingeni ngamakhemikhali ekamelweni lokushisa, isebenza kakhulu kunomoya-mpilo ezingeni lokushisa eliphezulu, izinzile kune-fluorine, futhi kulula ukuyiphatha. I-Nitrogen trifluoride isetshenziswa kakhulu njengegesi yokufaka i-plasma kanye ne-ejenti yokuhlanza igumbi, futhi ifanele izinkundla zokukhiqiza ama-semiconductor chips, imibukiso yephaneli eyisicaba, imicu yokubona, amaseli e-photovoltaic, njll.

Uma kuqhathaniswa namanye amagesi e-electronic ane-fluorine,i-nitrogen trifluorideinezinzuzo zokusabela okusheshayo nokusebenza kahle okuphezulu. Ikakhulukazi ekucushweni kwezinto eziqukethe i-silicon njenge-silicon nitride, inezinga eliphezulu lokuqopha nokukhetha, kungashiyi nsalela ebusweni bento eqoshiwe. Futhi iyi-ejenti yokuhlanza enhle kakhulu futhi ayinakho ukungcola phezulu, okungahlangabezana nezidingo zenqubo yokucubungula.