Amagesi akhethekile kagesi avamile aqukethe i-fluorine afaka phakathii-hexafluoride yesulfure (SF6)i-tungsten hexafluoride (WF6),i-carbon tetrafluoride (CF4), i-trifluoromethane (CHF3), i-nitrogen trifluoride (NF3), i-hexafluoroethane (C2F6) kanye ne-octafluoropropane (C3F8).
Ngokuthuthuka kwe-nanotechnology kanye nentuthuko enkulu embonini yama-elekthronikhi, isidingo sayo sizokhula usuku nosuku. I-nitrogen trifluoride, njengegesi ekhethekile kagesi ebaluleke kakhulu futhi esetshenziswa kakhulu ekukhiqizweni nasekucutshungulweni kwamaphaneli nama-semiconductor, inendawo enkulu yemakethe.
Njengohlobo lwegesi ekhethekile equkethe i-fluorine,i-nitrogen trifluoride (NF3)ingumkhiqizo wegesi okhethekile we-elekthronikhi onamandla amakhulu emakethe. Ayisebenzi ngamakhemikhali ekushiseni kwegumbi, isebenza kakhulu kune-oxygen ekushiseni okuphezulu, izinzile kakhulu kune-fluorine, futhi kulula ukuyiphatha. I-trifluoride ye-nitrogen isetshenziswa kakhulu njengegesi yokuhlikihla i-plasma kanye ne-ejenti yokuhlanza igumbi lokusabela, futhi ifanelekela izinkambu zokukhiqiza ama-semiconductor chips, izibonisi zephaneli ezisicaba, imicu ye-optical, amaseli e-photovoltaic, njll.
Uma kuqhathaniswa namanye amagesi kagesi aqukethe i-fluorine,i-nitrogen trifluorideinezinzuzo zokusabela okusheshayo kanye nokusebenza kahle okuphezulu. Ikakhulukazi ekuqopheni izinto eziqukethe i-silicon njenge-silicon nitride, inezinga eliphezulu lokuqopha kanye nokukhetha, ingashiyi nsalela ebusweni bento eqotshiwe. Futhi iyisihlanzi esihle kakhulu futhi ayinangcolisi ebusweni, engahlangabezana nezidingo zenqubo yokucubungula.
Isikhathi sokuthunyelwe: Septhemba 14-2024
