Amagesi ajwayelekile aqukethe ama-elekthronikhi akhethekile aquketheIsibabule Hexafluoride (SF6), i-tungsten hexafluoride (WF6),I-Carbon Tetrafluoride (CF4), Trifluoromethane (CHF3), i-Nitrogen Trifluoride (NF3), i-Hexafluoroaroethane (C2F6) ne-Octafluoropropane (C3F8).
Ngokuthuthukiswa kwe-nanotechnology kanye nokuthuthuka okukhulu komkhakha we-elekthronikhi, ukufunwa kwako kuzokwenyuka usuku nosuku. I-nitrogen trifluoride, njengegesi ekhethekile esetshenziswa kakhulu futhi esetshenziswe kagesi ekhethekile ekukhiqizeni nasekucutshungulweni kwamaphaneli kanye nama-semiconductors, inesikhala esibanzi semakethe.
Njengohlobo lwe-fluorine-equkethe igesi ekhethekile ekhethekile,I-nitrogen trifluoride (NF3)Ingabe umkhiqizo wegesi okhethekile kagesi onamandla amakhulu emakethe. I-indert yamakhemikhali emazingeni okushisa asekamelweni, isebenza kakhulu kune-oksijini yokushisa okuphezulu, ezinzile kakhulu kune-fluorine, futhi kulula ukuyiphatha. I-Nitrogen Trifluoride isetshenziswa kakhulu njengegesi ye-plasma etching kanye ne-ejenti yokuhlanza igumbi lokuhlanza, futhi ilungele izinkambu zokukhiqiza ze-semiconductor chips, ukuboniswa kwephaneli yephaneli, amaseli we-Photovoltaic, njll.
Qhathanisa namanye amagesi aqukethe ama-elekthronikhi aqukethe ama-elektronic,I-nitrogen trifluorideinezinzuzo zokuphendula okusheshayo nokusebenza okuphezulu. Ikakhulu e-Etching of Silicon - Izinto eziqukethe ama-Silicon Nitride, inezinga eliphakeme eliphakeme kanye nokukhetha, kungashiyanga nsalela ebusweni bento ebekiwe. Futhi kungumenzeli omuhle wokuhlanza futhi awunakungcoliswa kobuso, okungahlangabezana nezidingo zenqubo yokucubungula.
Isikhathi sePosi: Sep-14-2024