Inani Elikhulu Legesi Ekhethekile Ye-Electronic – I-Nitrogen Trifluoride NF3

Imboni yezwe lethu ye-semiconductor kanye nemboni yamaphaneli igcina izinga eliphezulu lokuchuma. I-Nitrogen trifluoride, njengegesi ye-elekthronikhi ebaluleke kakhulu futhi enkulu kunazo zonke ekukhiqizeni nasekucubunguleni amaphaneli nama-semiconductors, inendawo yemakethe ebanzi.

Amagesi kagesi akhethekile aqukethe i-fluorine ahlanganisai-sulphur hexafluoride (SF6)i-tungsten hexafluoride (WF6),i-carbon tetrafluoride (CF4), i-trifluoromethane (CHF3), i-nitrogen trifluoride (NF3), i-hexafluoroethane (C2F6) ne-octafluoropropane (C3F8). I-Nitrogen trifluoride (NF3) isetshenziswa kakhulu njengomthombo we-fluorine we-hydrogen fluoride-fluoride gas high-energy chemical lasers. Ingxenye esebenzayo (cishe ama-25%) yamandla okusabela phakathi kwe-H2-O2 ne-F2 ingakhishwa ngemisebe ye-laser, ngakho-ke amalaser e-HF-OF angamalaser athembisa kakhulu phakathi kwama-laser amakhemikhali.

I-Nitrogen trifluoride iyigesi enhle kakhulu yokufaka i-plasma embonini ye-microelectronics. Ngokufakwa kwe-silicon ne-silicon nitride, i-nitrogen trifluoride inezinga eliphezulu lokuqopha nokukhetha kune-carbon tetrafluoride nengxube ye-carbon tetrafluoride nomoya-mpilo, futhi ayinakho ukungcola phezulu. Ikakhulukazi ekucushweni kwezinto zesekethe ezihlanganisiwe ezinogqinsi olungaphansi kuka-1.5um, i-nitrogen trifluoride inezinga elihle kakhulu lokuqopha kanye nokukhetha, ingashiyi nsalela ebusweni bento eqoshiwe, futhi iphinde ibe i-ejenti yokuhlanza enhle kakhulu. Ngokuthuthuka kwe-nanotechnology kanye nentuthuko enkulu yemboni yezogesi, isidingo sayo sizokhula usuku nosuku.

Njengohlobo lwegesi ekhethekile equkethe i-fluorine, i-nitrogen trifluoride (NF3) ingumkhiqizo wegesi okhethekile we-elekthronikhi omkhulu kunayo yonke emakethe. Ayingeni ngamakhemikhali ekamelweni lokushisa, isebenza kakhulu kunomoya-mpilo, izinzile kune-fluorine, futhi kulula ukuyiphatha lapho izinga lokushisa liphezulu.

I-Nitrogen trifluoride isetshenziswa kakhulu njenge-plasma etching gas kanye ne-reaction chamber cleaner, ilungele izinkambu zokukhiqiza ezifana nama-semiconductor chips, imibukiso yamaphaneli ayisicaba, imicu yokubona, amaseli e-photovoltaic, njll.

Uma kuqhathaniswa namanye amagesi e-electronic ane-fluorine, i-nitrogen trifluoride inezinzuzo zokusabela okusheshayo nokusebenza kahle okuphezulu, ikakhulukazi ekucushweni kwezinto eziqukethe i-silicon njenge-silicon nitride, inezinga eliphezulu lokucwiliswa nokukhetha, ingashiyi nsalela phezu kwento eqoshiwe, futhi iyi-ejenti yokuhlanza enhle kakhulu, futhi ihlangabezana nezidingo ze-non-pollution.