Inani elikhulu kakhulu legesi ekhethekile kagesi - i-nitrogen trifluoride NF3

Imboni yethu ye-semiconductor yezwe lethu kanye nemboni yephaneli igcina izinga eliphakeme lokuchuma. I-Nitrogen Trifluoride, njengegesi ekhethekile ekhethekile futhi enkulu kunazo zonke ekhethekile ye-elekthronikhi ekhethekile ekukhiqizeni nasekucutshungulweni kwamaphaneli kanye nama-semiconductors, inesikhala esibanzi semakethe.

Amagesi akhethekile asetshenziswa ngama-elekthronikhi ajwayelekile aquketheIsibabule Hexafluoride (SF6), i-tungsten hexafluoride (WF6),I-Carbon Tetrafluoride (CF4), Trifluoromethane (CHF3), i-Nitrogen Trifluoride (NF3), i-Hexafluoroaroethane (C2F6) ne-Octafluoropropane (C3F8). I-Nitrogen Trifluoride (NF3) isetshenziswa kakhulu njengomthombo we-fluorine we-hydrogen fluoride-fluoridegesi igesi yamakhemikhali wamakhemikhali. Ingxenye ephumelelayo (cishe i-25%) yamandla okuphendula phakathi kwe-H2-O2 ne-F2 ingakhishwa ngemisebe yeLaser, ngakho-ke ama-lasers athe ama-lasers athembisa kakhulu phakathi kwama-lasers amakhemikhali.

I-Nitrogen Trifluoride iyi-plasma etching enhle kakhulu e-plasma etching embonini ye-microelectronics. Nge-Silicon ne-Silicon Nitride, i-nitrogen trifluoride inezinga eliphakeme le-etching kanye nokukhetha kune-carbon tetrafluoride kanye nengxube ye-carbon tetrafluoride nomoya-mpilo, futhi akukho ukungcoliswa komhlaba. Ikakhulu ekuhlolweni kwezinto zokuhlanganisa ezihlanganisiwe ezinobukhulu obungaphansi kwe-1.5um, i-nitrogen trifluoride inezinga elihle kakhulu le-etching kanye nokukhetha, kungashiyi nsalela ebusweni bento engenele, futhi futhi kungumenzeli omuhle kakhulu wokuhlanza. Ngokuthuthukiswa kwe-nanotechnology kanye nokuthuthuka okukhulu komkhakha we-elekthronikhi, ukufunwa kwako kuzokwenyuka usuku nosuku.

Njengohlobo lwe-fluorine-equkethe igesi ekhethekile ekhethekile, i-nitrogen trifluoride (NF3) ngumkhiqizo omkhulu wegesi okhethekile wegesi emakethe. I-indert yamakhemikhali emazingeni okushisa asekamelweni, isebenza kakhulu kune-oksijini, iqinile kune-fluorine, futhi kulula ukuyiphatha ekushiseni okuphezulu.

I-Nitrogen Trifluoride isetshenziswa ikakhulukazi njenge-plasma etching igesi kanye ne-ejenti yokuhlanza i-plasma, elungele izinkambu zokukhiqiza ezifana nama-semiconductor chips, ama-optical panel ekhombisa, amaseli we-Photovoltaic, njll.

Qhathanisa namanye amagesi aqukethe ama-elekthronikhi aqukethe ama-elekthronikhi, i-nitrogen trifluoride inezinzuzo zokusabela okusheshayo nokusebenza okuphezulu, inezilinganiso eziphezulu ze-silicon, futhi i-ejenti enhle yokuhlanza, futhi ayizukungcoliswa kobuso futhi ingahlangana Izidingo zenqubo yokucubungula.