Inani Elikhulu Kakhulu Legesi Ekhethekile Ye-elekthronikhi - I-Nitrogen Trifluoride NF3

Imboni ye-semiconductor kanye nemboni yamaphaneli ezweni lethu igcina izinga eliphezulu lokuchuma. I-nitrogen trifluoride, njengegesi ekhethekile kagesi ebaluleke kakhulu futhi enomthamo omkhulu ekukhiqizweni nasekucutshungulweni kwamaphaneli nama-semiconductor, inendawo enkulu yemakethe.

Amagesi akhethekile kagesi aqukethe i-fluorine asetshenziswa kakhulu afaka phakathii-hexafluoride yesulfure (SF6)i-tungsten hexafluoride (WF6),i-carbon tetrafluoride (CF4), i-trifluoromethane (CHF3), i-nitrogen trifluoride (NF3), i-hexafluoroethane (C2F6) kanye ne-octafluoropropane (C3F8). I-nitrogen trifluoride (NF3) isetshenziswa kakhulu njengomthombo we-fluorine wama-laser amakhemikhali anamandla aphezulu e-hydrogen fluoride-fluoride. Ingxenye esebenzayo (cishe u-25%) wamandla okusabela phakathi kwe-H2-O2 ne-F2 ingakhishwa ngemisebe ye-laser, ngakho-ke ama-laser e-HF-OF angama-laser athembisayo kakhulu phakathi kwama-laser amakhemikhali.

I-nitrogen trifluoride iyigesi elihle kakhulu lokusika i-plasma embonini yama-microelectronics. Ngokusika i-silicon ne-silicon nitride, i-nitrogen trifluoride inezinga eliphezulu lokusika nokukhetha kune-carbon tetrafluoride kanye nengxube ye-carbon tetrafluoride ne-oxygen, futhi ayinakho ukungcola ebusweni. Ikakhulukazi ekusikeni kwezinto zesekethe ezihlanganisiwe ezinobukhulu obungaphansi kuka-1.5um, i-nitrogen trifluoride inezinga elihle kakhulu lokusika nokukhetha, ingashiyi nsalela ebusweni bento eqoshiwe, futhi iyi-ejenti yokuhlanza enhle kakhulu. Ngokuthuthuka kwe-nanotechnology kanye nentuthuko enkulu yemboni ye-elekthronikhi, isidingo sayo sizokhula usuku nosuku.

Njengohlobo lwegesi ekhethekile equkethe i-fluorine, i-nitrogen trifluoride (NF3) ingumkhiqizo wegesi ekhethekile kagesi omkhulu kunayo yonke emakethe. Ayisebenzi ngamakhemikhali ekushiseni kwegumbi, isebenza kakhulu kune-oxygen, izinzile kakhulu kune-fluorine, futhi kulula ukuyiphatha ekushiseni okuphezulu.

I-nitrogen trifluoride isetshenziswa kakhulu njengegesi yokuhlikihla i-plasma kanye ne-ejenti yokuhlanza igumbi lokusabela, ifanelekela izinkambu zokukhiqiza ezifana nama-semiconductor chips, izibonisi zamaphaneli ayisicaba, imicu ye-optical, amaseli e-photovoltaic, njll.

Uma kuqhathaniswa namanye amagesi kagesi aqukethe i-fluorine, i-nitrogen trifluoride inezinzuzo zokusabela okusheshayo kanye nokusebenza kahle okuphezulu, ikakhulukazi ekuqopheni izinto eziqukethe i-silicon njenge-silicon nitride, inezinga eliphezulu lokuqopha kanye nokukhetha, ingashiyi nsalela ebusweni bento eqotshiwe, futhi iyisihlanzi esihle kakhulu, futhi ayingcolisi ebusweni futhi ingahlangabezana nezidingo zenqubo yokucubungula.