I-Carbon Tetrafluoride (CF4)

Amapharamitha Obuchwepheshe

I-Carbon tetrafluoride iyi-halogenated hydrocarbon enefomula yamakhemikhali i-CF4. Ingabhekwa njenge-halogenated hydrocarbon, i-halogenated methane, i-perfluorocarbon, noma njenge-inorganic compound. I-Carbon tetrafluoride iyigesi engenambala nengenaphunga, ayincibiliki emanzini, incibilika ku-benzene kanye ne-chloroform. Izinzile ngaphansi kokushisa okuvamile kanye nengcindezi, gwema ama-oxidant aqinile, izinto ezivuthayo noma ezivuthayo. Igesi engashi, ingcindezi yangaphakathi yesitsha izokwanda uma ivezwa ekushiseni okuphezulu, futhi kukhona ingozi yokuqhekeka nokuqhuma. Izinzile ngamakhemikhali futhi ayishi. I-reagent yensimbi ye-ammonia-sodium ewuketshezi kuphela engasebenza ekushiseni kwegumbi. I-Carbon tetrafluoride iyigesi ebangela umphumela we-greenhouse. Izinzile kakhulu, ingahlala emoyeni isikhathi eside, futhi iyigesi ye-greenhouse enamandla kakhulu. I-Carbon tetrafluoride isetshenziswa enqubweni yokuchoboza i-plasma yamasekethe ahlukahlukene ahlanganisiwe. Iphinde isetshenziswe njengegesi yelaser, futhi isetshenziswa eziqandisini ezisezingeni eliphansi lokushisa, izinyibilikisi, izinto zokugcoba, izinto zokuvimbela ukushisa, kanye nezipholile zezinto zokuthola i-infrared. Yigesi esetshenziswa kakhulu ekuqopheni i-plasma embonini yama-microelectronics. Iyingxube yegesi ye-tetrafluoromethane ephezulu ehlanzekile kanye negesi ye-tetrafluoromethane ephezulu ehlanzekile kanye ne-oxygen ephezulu ehlanzekile. Ingasetshenziswa kabanzi ku-silicon, i-silicon dioxide, i-silicon nitride, kanye nengilazi ye-phosphosilicate. Ukuqopha izinto ezincane zefilimu njenge-tungsten ne-tungsten nakho kusetshenziswa kabanzi ekuhlanzeni ubuso bamadivayisi kagesi, ekukhiqizweni kwamaseli elanga, ubuchwepheshe be-laser, ekuqandisweni kwezinga lokushisa eliphansi, ekuhlolweni kokuvuza, kanye nasensizeni ekukhiqizweni kwesekethe ephrintiwe. Isetshenziswa njengobuchwepheshe bokuqopha igesi obusezingeni eliphansi lokushisa kanye ne-plasma dry kumasekethe ahlanganisiwe. Izinyathelo zokuqapha zokugcina: Gcina endaweni yokugcina igesi epholile, enomoya ongashi. Gcina kude nomlilo nemithombo yokushisa. Izinga lokushisa lokugcina akufanele lidlule ku-30°C. Kufanele igcinwe ngokwehlukana nezinto ezivuthayo kalula (ezivuthayo) kanye nezinto ezi-oxidant, futhi igweme ukugcinwa okuxubile. Indawo yokugcina kufanele ifakwe imishini yokwelapha ephuthumayo evuzayo.

Isicelo:

① Isiqandisi:

I-Tetrafluoromethane ngezinye izikhathi isetshenziswa njengesiqandisi esiphansi sokushisa.

② Ukuqopha:

Isetshenziswa ekwenzeni izinto ezincane ze-elekthronikhi kuphela noma ihlanganiswe nomoya-mpilo njenge-plasma etchant ye-silicon, i-silicon dioxide, kanye ne-silicon nitride.

Iphakheji evamile:

Inzuzo:

①Ubumsulwa obuphezulu, indawo yakamuva;

②Umkhiqizi wesitifiketi se-ISO;

③Ukulethwa okusheshayo;

④Uhlelo lokuhlaziya oluku-inthanethi lokulawula ikhwalithi kuzo zonke izinyathelo;

⑤Isidingo esiphezulu kanye nenqubo ecophelelayo yokuphatha isilinda ngaphambi kokugcwalisa;