Intengo ecashunwe ye-CF4 Tetraflogluoride CF4 igesi

Ngalesi siqu esinqunywe engqondweni, sihlakulele phakathi komunye wabakhiqizi abasezingeni eliphakeme kakhulu, ababizayo, nabangakwazi ukusebenza ngentengo ngentengo ecashunwe ye-CHOBOORIOORIDIDE CF4 Igesi, ikhwalithi yenani elinolaka kanye ne-Ulatis Price Tag naphezu komncintiswano omkhulu wamazwe.
Ngalesi siqu esinqunywe engqondweni, sihlakulele phakathi komunye wabakhiqizi abasebenza kakhulu ngokwezobuchwepheshe, ababiza kakhulu, abasebenza ngentengo nabasebenza ngentengoI-CH CH CF4 RF4 RF4 REGIGANIONATION GEGE KANYE NE-GEGELISER, Izikhungo zethu ezihlomele kahle nokulawulwa okuhle kakhulu kuzo zonke izigaba zokukhiqiza zisenza sikwazi ukuqinisekisa ukwaneliseka kwamakhasimende okuphelele. Uma unentshisekelo kunoma yimiphi imikhiqizo yethu nezixazululo noma ongathanda ukuxoxa nge-oda yangokwezifiso, khumbula ukuzizwa ukhululekile ukuxhumana nami. Silindele ukwakha ubuhlobo bebhizinisi eliphumelelayo namakhasimende amasha emhlabeni jikelele.

Amapharamitha Ezobuchwepheshe

I-Carbon Tetrafluoride iyi-hydrocarbon ene-halogenated ngefomula yamakhemikhali CF4. Kungathathwa njenge-hydrocarbon ene-haldrocarbon, i-hallogeneted methane, i-mpouroorocarbonbon, noma njengendawo ye-inorganic. I-Carbon Tetrafluoride iyigesi engenamibala futhi engenamonakalo, insoluble emanzini, incibilika e-benzene ne-chloroform. Uzinzile ngaphansi kokushisa okujwayelekile nengcindezi, gwema ama-oxidants aqinile, izinto ezivuthayo noma ezivuthayo. Igesi engavuthayo, ingcindezi yangaphakathi yesitsha izokwanda lapho kuvezwa ukushisa okuphezulu, futhi kunengozi yokuqhekeka nokuqhuma. Izinzile ngamakhemikhali futhi ayivuli. I-liquid kuphela i-ammonia-sodium metal realent engasebenza emazingeni okushisa asekamelweni. I-Carbon Tetrafluoride yigesi ebangela ukuba kube nomphumela wokushisa komhlaba. Kuzinzile kakhulu, kungahlala emkhathini isikhathi eside, futhi kuyinto enamandla kakhulu abamba ukushisa. I-Carbon Tetrafluoride isetshenziswa kwinqubo ye-plasma etching yemibuthano ehlukahlukene ehlanganisiwe. Iphinde isetshenziswe njengegesi ye-laser, futhi isetshenziswa eziqandeni zokushisa okuphansi, izixazululo, izinto zokugcoba, izinto zokufaka ezifaka izicelo, kanye namapholi wokuthola imithondo. Kuyinto esetshenziswa kakhulu i-plasma etching gesi embonini ye-microelectronics. Ingxube ye-tetrafluoromenethane ephezulu yokuhlanzana kanye ne-tetrafluoromethane igesi ebumsulwa. Ingasetshenziswa kabanzi eSilicon, eSilicon Dioxide, Silicon Nitride, ne-phosphosilicate ingilazi. I-etching yezinto zokwakha amafilimu ezifana neTungsten neTungsten nayo isetshenziswa kabanzi ekuhlanzeni komhlaba, ukukhiqizwa kwamaseli elanga, ubuchwepheshe be-lolar, ukuhlolwa okuphansi, nokuhlanza okuphrintiwe komjikelezo. Kusetshenziswe njenge-REFTICTION-LECTIVETE ENTSHERE ne-Plasma eyomile etching Technology yemibuthano ehlanganisiwe. Izindlela zokugcina Isitoreji: Gcina endaweni yokugcina epholile, evutha umoya ongavutha. Gwema kude nomlilo nemithombo yokushisa. Izinga lokushisa lesitoreji akufanele lidlule ku-30 ​​° C. Kufanele igcinwe ngokwahlukana kusuka ku-anchastibles (okuhlangene) nama-oxidants, futhi uvikele isitoreji esixubekile. Indawo yokugcina kufanele ifakwe ngemishini yokuvuza yokwelashwa okuvuzayo.

Isicelo:

①friji:

I-Tetrafluoromene kwesinye isikhathi isetshenziswa njengesiqandisi esiphansi sokushisa.

② Etching:

Isetshenziswa ku-elekthronikhi microcabrication yedwa noma inhlanganisela ngomoya-mpilo njenge-plasma etchant ye-silicon, eSilicon Dioxide, kanye neSilicon Nitride.

Iphakethe elijwayelekile:

Inzuzo:

Ukuhlanzeka ①igh, indawo yakamuva;

Umkhiqizi wesitifiketi se-Iso;

Ukulethwa kokufa;

Uhlelo lokuhlaziya umugqa we-④on-line lokulawulwa kwekhwalithi kuzo zonke izinyathelo;

Isidingo se-⑤Igh kanye nenqubo yokucophelela yokusingatha isilinda ngaphambi kokugcwaliswa;Ngalesi siqu esinqunywe engqondweni, sihlakulele phakathi komunye wabakhiqizi abasezingeni eliphakeme kakhulu, ababizayo, nabangakwazi ukusebenza ngentengo ngentengo ecashunwe ye-CHOBOORIOORIDIDE CF4 Igesi, ikhwalithi yenani elinolaka kanye ne-Ulatis Price Tag naphezu komncintiswano omkhulu wamazwe.
Intengo ecashunwe yeI-CH CH CF4 RF4 RF4 REGIGANIONATION GEGE KANYE NE-GEGELISER, Izikhungo zethu ezihlomele kahle nokulawulwa okuhle kakhulu kuzo zonke izigaba zokukhiqiza zisenza sikwazi ukuqinisekisa ukwaneliseka kwamakhasimende okuphelele. Uma unentshisekelo kunoma yimiphi imikhiqizo yethu nezixazululo noma ongathanda ukuxoxa nge-oda yangokwezifiso, khumbula ukuzizwa ukhululekile ukuxhumana nami. Silindele ukwakha ubuhlobo bebhizinisi eliphumelelayo namakhasimende amasha emhlabeni jikelele.