Ukusetshenziswa kwe-tungsten hexafluoride (WF6)

I-Tungsten hexafluoride (WF6) ifakwa phezu kwewafa ngenqubo ye-CVD, igcwalisa imisele yokuxhuma insimbi, futhi yakhe ukuxhuma kwensimbi phakathi kwezingqimba.

Ake sikhulume nge-plasma kuqala.I-Plasma iwuhlobo lwendaba ikakhulukazi eyakhiwe ngama-electron amahhala nama-ion ashajiwe.Itholakala kabanzi endaweni yonke futhi ngokuvamile ibhekwa njengesimo sesine sezinto.Ibizwa ngokuthi i-plasma state, ebizwa nangokuthi "i-Plasma".I-Plasma ine-conductivity ephezulu kagesi futhi inomphumela oqinile wokuhlanganisa nenkundla ye-electromagnetic.Kuyigesi ingxenye ye-ionized, eyakhiwe ngama-electron, ama-ion, ama-radicals mahhala, izinhlayiya ezingathathi hlangothi, nama-photons.I-plasma ngokwayo iyinhlanganisela engathathi hlangothi kagesi equkethe izinhlayiya ezisebenza ngokomzimba namakhemikhali.

Incazelo eqondile iwukuthi ngaphansi kwesenzo samandla aphezulu, i-molecule izonqoba amandla e-van der Waals, i-chemical bond force kanye ne-Coulomb force, futhi yethule uhlobo lukagesi olungathathi hlangothi lulonke.Ngesikhathi esifanayo, amandla aphezulu anikezwa ngaphandle anqoba amandla amathathu angenhla.Umsebenzi, ama-electron nama-ion aveza isimo esikhululekile, esingasetshenziswa ngokuzenzela ngaphansi kokuguqulwa kwenkundla kazibuthe, njengenqubo yokufaka i-semiconductor, inqubo ye-CVD, inqubo ye-PVD ne-IMP.

Ayini amandla aphezulu?Ngokombono, kokubili izinga lokushisa eliphezulu kanye ne-high frequency RF kungasetshenziswa.Ngokuvamile, izinga lokushisa eliphezulu cishe akunakwenzeka ukulifinyelela.Lesi sidingo sezinga lokushisa siphezulu kakhulu futhi singase sisondele ekushiseni kwelanga.Ngokuyisisekelo akunakwenzeka ukufeza kule nqubo.Ngakho-ke, imboni ivamise ukusebenzisa i-high-frequency RF ukuyifinyelela.I-Plasma RF ingafinyelela phezulu njenge-13MHz+.

I-Tungsten hexafluoride ifakwe i-plasma ngaphansi kwesenzo sensimu kagesi, bese ifakwa umhwamuko yinkundla kazibuthe.Ama-athomu ama-W afana nezimpaphe zehansi zasebusika futhi awela phansi ngaphansi kwesenzo samandla adonsela phansi.Kancane kancane, ama-athomu angu-W afakwa ezimbotsheni, futhi ekugcineni agcwaliswe Egcwele ngezimbobo ukuze enze ukuxhumana kwensimbi.Ngaphezu kokufaka ama-athomu angu-W emigodini, ingabe azophinde afakwe phezu kwe-Wafer?Yebo, nakanjani.Ngokuvamile, ungasebenzisa inqubo ye-W-CMP, okuyilokho esikubiza ngokuthi inqubo yokugaya ngomshini ukuze isuswe.Kufana nokusebenzisa umshanelo ukushanela phansi ngemva kweqhwa elinzima.Iqhwa eliphansi liyakhukhuleka, kodwa iqhwa emgodini ophansi liyosala.Phansi, kucishe kufane.