Ukusetshenziswa kwe-tungsten hexafluoride (WF6)

I-Tungsten hexafluoride (WF6) ifakwa phezu kwewafa ngenqubo ye-CVD, igcwalisa imisele yokuxhuma insimbi, futhi yakhe ukuxhuma kwensimbi phakathi kwezingqimba.

Ake sikhulume nge-plasma kuqala. I-Plasma iwuhlobo lwendaba ikakhulukazi eyakhiwe ngama-electron amahhala nama-ion ashajiwe. Itholakala kabanzi endaweni yonke futhi ngokuvamile ibhekwa njengesimo sesine sezinto. Ibizwa ngokuthi i-plasma state, ebizwa nangokuthi "i-Plasma". I-Plasma ine-conductivity ephezulu kagesi futhi inomphumela oqinile wokuhlanganisa nenkundla ye-electromagnetic. Kuyigesi ingxenye ye-ionized, eyakhiwe ngama-electron, ama-ion, ama-radicals mahhala, izinhlayiya ezingathathi hlangothi, nama-photons. I-plasma ngokwayo iyinhlanganisela engathathi hlangothi kagesi equkethe izinhlayiya ezisebenza ngokomzimba namakhemikhali.

Incazelo eqondile iwukuthi ngaphansi kwesenzo samandla aphezulu, i-molecule izonqoba amandla e-van der Waals, i-chemical bond force kanye ne-Coulomb force, futhi yethule uhlobo lukagesi olungathathi hlangothi lulonke. Ngesikhathi esifanayo, amandla aphezulu anikezwa ngaphandle anqoba amandla amathathu angenhla. Umsebenzi, ama-electron nama-ion aveza isimo esikhululekile, esingasetshenziswa ngokuzenzela ngaphansi kokuguqulwa kwenkundla kazibuthe, njengenqubo yokufaka i-semiconductor, inqubo ye-CVD, inqubo ye-PVD ne-IMP.

Ayini amandla aphezulu? Ngokombono, kokubili izinga lokushisa eliphezulu kanye ne-high frequency RF kungasetshenziswa. Ngokuvamile, izinga lokushisa eliphezulu cishe akunakwenzeka ukulifinyelela. Lesi sidingo sezinga lokushisa siphezulu kakhulu futhi singase sisondele ekushiseni kwelanga. Ngokuyisisekelo akunakwenzeka ukufeza kule nqubo. Ngakho-ke, imboni ivamise ukusebenzisa i-high-frequency RF ukuyifinyelela. I-Plasma RF ingafinyelela phezulu njenge-13MHz+.

I-Tungsten hexafluoride ifakwe i-plasma ngaphansi kwesenzo sensimu kagesi, bese ifakwa umhwamuko yinkundla kazibuthe. Ama-athomu ama-W afana nezimpaphe zehansi zasebusika futhi awela phansi ngaphansi kwesenzo samandla adonsela phansi. Kancane kancane, ama-athomu angu-W afakwa ezimbotsheni, futhi ekugcineni agcwaliswe Egcwele ngezimbobo ukuze enze ukuxhumana kwensimbi. Ngaphezu kokufaka ama-athomu angu-W emigodini, ingabe nawo azofakwa phezu kwe-Wafer? Yebo, nakanjani. Ngokuvamile, ungasebenzisa inqubo ye-W-CMP, okuyiyona ndlela esiyibiza ngokuthi inqubo yokugaya ukuze isuswe. Kufana nokusebenzisa umshanelo ukushanela phansi ngemva kweqhwa elinzima. Iqhwa eliphansi liyakhukhuleka, kodwa iqhwa emgodini ophansi liyosala. Phansi, kucishe kufane.