Ukusetshenziswa kwe-tungsten hexafluoride (WF6)

UTungsten Hexafluoride (WF6) ufakwa ebusweni be-wafer ngenqubo ye-CVD, egcwalisa imisele yensimbi yokuxhumana, nokwakha ukuxhumana kwensimbi phakathi kwezendlalelo.

Ake sixoxe nge-plasma kuqala. I-Plasma iyindlela yendaba eyakhiwa ikakhulukazi ama-elektroni wamahhala nama-ion akhishwe. Ikhona kabanzi endaweni yonke futhi imvamisa ibhekwa njengesimo sesine sendaba. Ibizwa ngokuthi yi-Plasma State, ebizwa nangokuthi "Plasma". I-Plasma inokuqhutshwa okuphezulu kagesi futhi inomphumela oqinile wokuhlanganisa nenkambu ye-electromagnetic. Kuyigesi e-Iorized ngokwengxenye, eyakhiwa ama-elektroni, i-ion, ama-radicals wamahhala, izinhlayiya ezingathathi hlangothi, kanye nezithombe. I-plasma ngokwayo iyingxube engathathi hlangothi kagesi equkethe izinhlayiya ezisebenzayo ngokomzimba nangokomzimba.

Ukuchazwa okuqondile ukuthi ngaphansi kwesenzo samandla aphezulu, i-molecule izonqoba i-van der Waals Force, i-Chemical Bonder Force kanye ne-CouLomb Force, bese yethula uhlobo lokungathathi hlangothi wonke. Ngasikhathi sinye, amandla aphezulu afakwe ngaphandle anqoba amabutho amathathu angenhla. Umsebenzi, ama-elektroni nama-ion avela eFree State, angasetshenziswa ngokwezifiso ngaphansi kokushintshwa kwamandla kazibuthe, njengenqubo ye-semiconductor etching, inqubo ye-CVD, i-PVD ne-Imp inqubo.

Yini amandla aphezulu? Emthiyori, womabili amazinga okushisa aphezulu kanye nemvamisa ephezulu i-RF ingasetshenziswa. Ngokuvamile ukukhuluma, izinga lokushisa eliphakeme cishe akunakwenzeka ukufezekisa. Le mfuneko yokushisa iphakeme kakhulu futhi ingase isondele ekushiseni kwelanga. Empeleni akunakwenzeka ukufeza inqubo. Ngakho-ke, imboni ivame ukusebenzisa imvamisa ephezulu ye-RF ukuyifinyelela. I-Plasma RF ingafinyelela phezulu njenge-13MHHZ +.

I-Tungsten Hexafluoride ifakwe ngaphansi kwesenzo sensimu kagesi, bese kuba khona umphunga obekelwe amandla kazibuthe. Ama-athomu afana nezimpaphe ze-goose yasebusika futhi awe emhlabathini ngaphansi kwesenzo samandla adonsela phansi. Kancane kancane, ama-athomu afakwa kwizimbobo, ekugcineni agcwaliswe ngokugcwele ngezimbobo zokwakha ukuxhumana kwensimbi. Ngaphezu kokufaka ama-athomu e-W ngokusebenzisa izimbobo, kuzobe kufakwa futhi ebusweni be-wafer? Yebo, nakanjani. Ngokuvamile, ungasebenzisa inqubo ye-W-CMP, okuyilokho esikubiza ngokuthi yinqubo yokugaya okwenziwe ngomshini ukususa. Kuyafana nokusebenzisa umshanelo ukushanela phansi ngemuva kweqhwa elinamandla. Iqhwa phansi likhukhulwe, kepha iqhwa emgodini phansi lizosala. Phansi, cishe okufanayo.