Ukusetshenziswa kwe-tungsten hexafluoride (WF6)

I-tungsten hexafluoride (WF6) ifakwa phezu kwe-wafer ngenqubo ye-CVD, igcwalisa imisele yokuxhumanisa insimbi, bese yakha ukuxhumana kwensimbi phakathi kwezingqimba.

Ake siqale sixoxe nge-plasma. I-plasma uhlobo lwento equkethe ama-electron amahhala nama-ion ashajwe. Itholakala kabanzi endaweni yonke futhi ivame ukubhekwa njengesimo sesine sento. Ibizwa ngokuthi isimo se-plasma, esibizwa nangokuthi "i-Plasma". I-plasma inomoya ophezulu kagesi futhi inomphumela oqinile wokuxhumanisa nensimu ye-electromagnetic. Iyigesi eyingxenye ye-ionized, eyakhiwe ama-electron, ama-ion, ama-free radicals, izinhlayiya ezingathathi hlangothi, nama-photon. I-plasma ngokwayo iyingxube engathathi hlangothi kagesi equkethe izinhlayiya ezisebenzayo ngokomzimba namakhemikhali.

Incazelo eqondile iwukuthi ngaphansi kwesenzo samandla aphezulu, i-molecule izonqoba amandla e-van der Waals, amandla e-chemical bond kanye namandla e-Coulomb, futhi iveze uhlobo lukagesi olungathathi hlangothi lulonke. Ngesikhathi esifanayo, amandla aphezulu anikezwa ngaphandle anqoba amandla amathathu angenhla. Umsebenzi, ama-electron nama-ion aveza isimo samahhala, esingasetshenziswa ngokwenziwa ngaphansi kokuguqulwa kwensimu yamagnetic, njengenqubo yokuqopha ye-semiconductor, inqubo ye-CVD, inqubo ye-PVD kanye ne-IMP.

Kuyini amandla aphezulu? Ngokwethiyori, kokubili izinga lokushisa eliphezulu kanye ne-RF evame kakhulu kungasetshenziswa. Ngokuvamile, izinga lokushisa eliphezulu cishe akunakwenzeka ukulifinyelela. Lesi sidingo sokushisa siphezulu kakhulu futhi singase sibe seduze nokushisa kwelanga. Ngokuyisisekelo akunakwenzeka ukulifinyelela kule nqubo. Ngakho-ke, imboni ivame ukusebenzisa i-RF evame kakhulu ukulifinyelela. I-Plasma RF ingafinyelela ku-13MHz+.

I-Tungsten hexafluoride ifakwa nge-plasma ngaphansi kwesenzo sensimu kagesi, bese ibekwa nge-vapor yinsimu yamagnetic. Ama-athomu e-W afana nezimpaphe ze-goose zasebusika futhi awela phansi ngaphansi kwesenzo samandla adonsela phansi. Kancane kancane, ama-athomu e-W afakwa emigodini edlulayo, futhi ekugcineni agcwaliswe imigodi egcwele edlulayo ukuze kwakheke ukuxhumana kwensimbi. Ngaphezu kokufaka ama-athomu e-W emigodini edlulayo, ingabe azobekwa ebusweni be-Wafer? Yebo, nakanjani. Ngokuvamile, ungasebenzisa inqubo ye-W-CMP, okuyilokho esikubiza ngokuthi inqubo yokugaya ngomshini ukususa. Kufana nokusebenzisa umshanelo ukushanela phansi ngemva kweqhwa elinzima. Iqhwa elisemhlabathini liyakhukhulwa, kodwa iqhwa elisemgodini ophansi lizosala. Phansi, cishe lifana.