I-hydrogen chlorideiyigesi engenambala enephunga elimnandi. Isixazululo sayo samanzi sibizwa ngokuthi i-hydrochloric acid, eyaziwa nangokuthi i-hydrochloric acid. I-hydrogen chloride iyancibilika kakhulu emanzini. Ku-0°C, ivolumu eyodwa yamanzi ingancibilikisa amavolumu angaba ngu-500 e-hydrogen chloride.

Inezakhiwo nezici ezilandelayo:

1. Ubumsulwa obuphezulu

Ubumsulwa bebanga le-elekthronikhii-hydrogen chloridekuphezulu kakhulu, ngokuvamile ku-ppm noma ezingeni eliphansi, ukuqinisekisa ukuthi akukho ukungcola okufakwa enqubweni yokukhiqiza i-semiconductor.

2. Ukungahlaliseki

Kuyigesi engasebenzisi amakhemikhali engahlangani nezinye izinto eziningi, okubaluleke kakhulu ukuvimbela ukungcoliswa kwezinto ze-semiconductor kanye nemishini.

3. Ukuqina okuphezulu

Ibanga le-elekthronikhii-hydrogen chloridengokuvamile ine-chemistry ezinzile ukuqinisekisa ukucutshungulwa kwe-semiconductor okuthembekile.

Ekucutshungulweni kwe-semiconductor, ukusetshenziswa okuyinhloko kwe-hydrogen chloride ye-elekthronikhi kuhlanganisa:

1. Ukuhlanza nokulungisa indawo

Njengesihlanzi sendawo esisebenzayo, izinga le-elekthronikhii-hydrogen chlorideisetshenziselwa ukususa ama-oxide nokungcola ebusweni be-substrate ukuqinisekisa ikhwalithi nobumsulwa bengqimba noma ifilimu ye-epitaxial.

2. Usizo lokukhula kwe-Epitaxial

Isetshenziswa njenge-ejenti yokwelapha ubuso enqubweni ye-epitaxial, iyasiza ekuthuthukiseni ikhwalithi yesendlalelo se-epitaxial, ithuthukise ukufanisa i-lattice, futhi inciphise ukwakheka kwamaphutha e-lattice.

3. Ukwelashwa kwangaphambi kwe-substrate

Ngaphambi kokulungiswa kwamadivayisi e-semiconductor, ibanga le-elekthronikhii-hydrogen chlorideingasetshenziswa ukwelapha ubuso be-substrate ukuze bakhe isisekelo esizinzile ukuze kuthuthukiswe ukunamathelana phakathi kwesendlalelo se-epitaxial kanye ne-substrate.

4. I-ejenti eyisizayo yokususa

Enqubweni yokufakwa kwe-chemical vapor (CVD) noma ukufakwa kwe-physical vapor (PVD), i-hydrogen chloride ye-elekthronikhi ingasetshenziswa njengendlela yokudlulisa isigaba segesi ukuze ihlanganyele ekusabeleni kwe-deposit yezinto ze-semiconductor.

5. I-ejenti yokudlulisa igesi

Njenge-ejenti yokudlulisa igesi, ezinye izinto ezibangela igesi zifakwa ekamelweni lokusabela ukusiza ukulungisa izinga lokufakwa kanye nokufana kwezinto.

Lezi zici zenza ibanga le-elekthronikhii-hydrogen chloridei-ejenti ebalulekile yokucubungula ubuchwepheshe be-semiconductor, enomthelela omkhulu ekusebenzeni nasekuthembekeni kwedivayisi yokugcina.

Ngaphezu kokusetshenziswa kwayo ekucubungulweni kwe-semiconductor, i-hydrogen chloride ye-elekthronikhi ingathola ukusetshenziswa okuhlukahlukene kwezinye izindawo, okuhlanganisa: Ukulungiswa kwezinto ezihlanzekile kakhulu, Amaseli Kaphethiloli, ukukhula kwezinto ze-semiconductor, i-Vapor Phase Lithography, Ukuhlaziywa Kwezinto, Ucwaningo Lwekhemikhali.

Ngokuvamile, ibanga le-elekthronikhii-hydrogen chlorideiyigesi eguquguqukayo, ehlanzekile kakhulu enezinhlobo eziningi zezicelo ngaphandle kokukhiqizwa kwe-semiconductor.