UBoron Trichloride (BCL3)Ingabe i-Inorganic Compound esetshenziswa kakhulu kwinqubo e-Dry Etching kanye ne-Chemical Vapor Deposition (CVD) ekukhiqizweni kwe-semiconductor. Kuyigesi engenamibala enephunga eliqinile le-pungent emazingeni okushisa asekamelweni futhi liyazwela umoya onomswakama ngoba liyakuqhuma i-hydrolyzes ukukhiqiza i-hydrochloric acid ne-boric acid.

Izicelo zeBoron Trichloride

Embonini ye-semiconductor,Boron trichlorideIsetshenziselwa ikakhulukazi i-etching eyomile ye-aluminium ne-dopant ukwakha izifunda ze-P-Type kuma-Silicon Wafers. Ingasetshenziswa futhi nezinto zokwenziwa ezifana ne-GAAS, SI, ALN, kanye ne-Boron Source kuzinhlelo ezithile ezithile. Ngaphezu kwalokho, iBoron Trichloride isetshenziswa kabanzi ekusebenzeni kwensimbi, imboni yengilazi, ukuhlaziya amakhemikhali kanye nocwaningo lwelebhu.

Ukuphepha kweBoron Trichloride

Boron trichlorideiyakhubazeka futhi inobuthi futhi ingadala ukulimala okukhulu emehlweni nasesikhumba. It hydrolyzes emgodini womoya onomswakama ukukhulula i-anobuthi hydrogen chloride gesi. Ngakho-ke, izindlela ezifanele zokuphepha zidinga ukuthathwa lapho zisingathwaBoron trichloride, kufaka phakathi ukugqoka izingubo zokuvikela, ama-goggles nemishini yokuvikela ukuphefumula, futhi isebenza endaweni enomoya omuhle.