I-China High Purity Carbon Tetrafluoride CF4 Gas edayisa ngokushisayo ye-Semiconductor Industry Etching

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Imininingwane Yomkhiqizo

Omaka bomkhiqizo

Sihlala senza umoya wethu "wokusungula okuletha inqubekela phambili, ukwenza impilo ethile yezinga eliphezulu, inzuzo yokukhangisa yezokuphatha, Amaphuzu esikweletu aheha amakhasimende e-Hot-selling China High Purity Carbon Tetrafluoride CF4 Gas for Semiconductor Industry Etching, Samukela ngokufudumele abangani abavela kuzo zonke izigaba ukuphila kwansuku zonke ukuzingela ukubambisana nokwakha ikusasa eliqhakazile nelibabazekayo.
Sihlala senza umoya wethu "wokusungula okuletha inqubekela phambili, ukwenza imali ethile yokuziphilisa enekhwalithi ephezulu, inzuzo yokumaketha yezokuphatha, amaphuzu esikweletu aheha amakhasimendeI-China CF4 Refrigerant Gas, I-Gas Cylinder, Singuzakwethu onokwethenjelwa ezimakethe zamazwe ngamazwe ezinezimpahla ezisezingeni eliphezulu. Izinzuzo zethu ukusungula izinto ezintsha, ukuguquguquka kanye nokwethembeka okwakhiwe phakathi neminyaka engamashumi amabili edlule. Sigxila ekuhlinzekeni isevisi kumakhasimende ethu njengento ebalulekile ekuqiniseni ubudlelwano bethu besikhathi eside. Ukutholakala kwethu okuqhubekayo kwezisombululo zebanga eliphezulu kuhlanganiswe nesevisi yethu emihle kakhulu yokuthengisa ngaphambi kokuthengisa nangemva kokuthengisa kuqinisekisa ukuncintisana okuqinile emakethe eya ngokuya yaba yimbulunga yonke.

Imingcele Yezobuchwepheshe

Ukucaciswa 99.999%
I-Oxygen+Argon ≤1ppm
I-nitrogen ≤4 ppm
Umswakama(H2O) ≤3 ppm
HF ≤0.1 ppm
CO ≤0.1 ppm
CO2 ≤1 ppm
SF6 ≤1 ppm
AmaHalocarbynes ≤1 ppm
Ukungcola Okuphelele ≤10 ppm

I-Carbon tetrafluoride iyi-halogenated hydrocarbon enefomula yamakhemikhali i-CF4. Ingathathwa njenge-halogenated hydrocarbon, i-halogenated methane, i-perfluorocarbon, noma njengenhlanganisela ye-inorganic. I-Carbon tetrafluoride iyigesi engenambala nengenaphunga, ayincibiliki emanzini, encibilika ku-benzene ne-chloroform. Izinzile ngaphansi kwezinga lokushisa elivamile nokucindezela, gwema ama-oxidants aqinile, izinto ezivuthayo noma ezivuthayo. Igesi engashi, ukucindezela kwangaphakathi kwesiqukathi kuzokwanda lapho kuvezwa ukushisa okuphezulu, futhi kunengozi yokuqhekeka nokuqhuma. Iqinile kumakhemikhali futhi ayishi. I-reagent yensimbi ye-ammonia-sodium kuphela engasebenza ekamelweni lokushisa. I-Carbon tetrafluoride iyigesi ebangela umphumela we-greenhouse. Izinzile, ingahlala emkhathini isikhathi eside, futhi iyigesi ebamba ukushisa enamandla kakhulu. I-Carbon tetrafluoride isetshenziswa kunqubo yokufaka i-plasma yamasekethe ahlukahlukene ahlanganisiwe. Ibuye isetshenziswe njengegesi ye-laser, futhi isetshenziswa eziqandisini ezinezinga lokushisa eliphansi, izinto ezincibilikisayo, izinto zokugcoba, izinto zokuvikela ukushisa, kanye nezinto ezipholisa amafu emithonjeni ye-infrared. Yigesi esetshenziswa kakhulu ye-plasma etching embonini ye-microelectronics. Kuyingxube yegesi ye-tetrafluoromethane ene-high-purity kanye ne-tetrafluoromethane high-purity gas kanye ne-high-purity oxygen. Ingasetshenziswa kabanzi ku-silicon, i-silicon dioxide, i-silicon nitride, nengilazi ye-phosphosilicate. Ukufakwa kwezinto zefilimu ezacile njenge-tungsten ne-tungsten nakho kusetshenziswa kabanzi ekuhlanzeni okungaphezulu kwezinto zikagesi, ukukhiqizwa kwamaseli elanga, ubuchwepheshe be-laser, isiqandisi esisezingeni eliphansi lokushisa, ukuhlolwa kokuvuza, kanye nokuhlanza ekukhiqizeni isekethe ephrintiwe. Isetshenziswa njengesiqandisi esinezinga lokushisa eliphansi kanye nobuchwepheshe bokufaka okomile be-plasma kumasekhethi ahlanganisiwe. Izinyathelo zokuphepha zokugcina: Gcina endaweni epholile, engenamoya engashi. Gcina kude nomlilo nemithombo yokushisa. Izinga lokushisa lokugcina akufanele lidlule ku-30°C. Kufanele igcinwe ngokuhlukana nezinto ezikwazi ukuvutha kalula (ezivuthayo) kanye nama-oxidants, futhi igweme ukugcinwa okuxubile. Indawo yokugcina kufanele ifakwe okokusebenza okuphuthumayo okuvuzayo.

Isicelo:

① Isiqandisi:

I-Tetrafluoromethane ngezinye izikhathi isetshenziswa njengesiqandisi esiphansi sokushisa.

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② Ukufaka:

Isetshenziswa ku-electronics microfabrication iyodwa noma ihlanganiswe nomoya-mpilo njenge-plasma etchant ye-silicon, i-silicon dioxide, ne-silicon nitride.

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Iphakheji evamile:

Umkhiqizo I-Carbon Tetrafluoride CF4
Usayizi Wephakheji 40Ltr Isilinda 50Ltr Isilinda  
Ukugcwalisa Isisindo Esiphelele/Cyl 30Kgs 38kgs  
I-QTY Ilayishwe ku-20'Container 250 Cyls 250 Cyls
Ingqikithi Yesisindo 7.5 amathani 9.5 amathani
Isisindo se-Cylinder Tare 50Kgs 55Kgs
Ivalvu I-CGA 580

Inzuzo:

①Ukuhlanzeka okuphezulu, indawo yakamuva;

②ISO umenzi wesitifiketi;

③Ukulethwa okusheshayo;

④Isistimu yokuhlaziya eku-inthanethi yokulawula ikhwalithi kuso sonke isinyathelo;

⑤Isidingo esiphezulu kanye nenqubo yokucophelela yokuphatha isilinda ngaphambi kokugcwalisa;Sihlala senza umoya wethu "wokusungula okuletha inqubekela phambili, ukwenza impilo ethile yezinga eliphezulu, inzuzo yokukhangisa yezokuphatha, Amaphuzu esikweletu aheha amakhasimende e-Hot-selling China High Purity Carbon Tetrafluoride CF4 Gas for Semiconductor Industry Etching, Samukela ngokufudumele abangani abavela kuzo zonke izigaba ukuphila kwansuku zonke ukuzingela ukubambisana nokwakha ikusasa eliqhakazile nelibabazekayo.
Ukudayiswa okushisayoI-China CF4 Refrigerant Gas, I-Gas Cylinder, Singuzakwethu onokwethenjelwa ezimakethe zamazwe ngamazwe ezinezimpahla ezisezingeni eliphezulu. Izinzuzo zethu ukusungula izinto ezintsha, ukuguquguquka kanye nokwethembeka okwakhiwe phakathi neminyaka engamashumi amabili edlule. Sigxila ekuhlinzekeni isevisi kumakhasimende ethu njengento ebalulekile ekuqiniseni ubudlelwano bethu besikhathi eside. Ukutholakala kwethu okuqhubekayo kwezisombululo zebanga eliphezulu kuhlanganiswe nesevisi yethu emihle kakhulu yokuthengisa ngaphambi kokuthengisa nangemva kokuthengisa kuqinisekisa ukuncintisana okuqinile emakethe eya ngokuya yaba yimbulunga yonke.


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