Ukuthengisa okushisayo kweChina Cuprity Carnal Tetrafluoride CF4 igesi ye-semiconductor imboni etching

Sijwayele ukwenza umoya wethu we- "Innovation eletha inqubekela phambili, ikhwalithi ephezulu yokwenza imali ethile yokuziphilisa, yokuphatha ihembe ngemfudumalo e-semiconducturide embonini ye-Chon Tetrafluoride Cf4 igesi yansuku zonke yokuzingela ukubambisana futhi yakha okugqamile futhi kusasa.
Sivame ukwenza umoya wethu we- "Innovation Eletha inqubekela phambili, ikhwalithi ephezulu yokwenza izimali eziphikisayo, zokuphatha, isikweletu sokuthenga ngesikweletu esiheha amakhasimendeI-China CF4 Efriji, Isilinda kaphethiloli, Singumlingani wakho othembekile ezimakethe zamazwe omhlaba ezinezimpahla ezisezingeni eliphakeme. Izinzuzo zethu ziyinto emisha, ukuguquguquka kanye nokwethenjwa kwakhiwe phakathi neminyaka engamashumi amabili edlule. Sigxile ekunikezeni insizakalo yamakhasimende ethu njengento esemqoka ekuqiniseni ubudlelwano bethu besikhathi eside. Ukutholakala kwethu okuqhubekayo kwezixazululo eziphakeme zebanga eliphakathi nendawo nokuthengisa kwethu okuhle kwangaphambili nangemva kokuthengisa kuqinisekisa ukuncintisana okuqinile emakethe yomhlaba wonke owandayo.

Amapharamitha Ezobuchwepheshe

I-Carbon Tetrafluoride iyi-hydrocarbon ene-halogenated ngefomula yamakhemikhali CF4. Kungathathwa njenge-hydrocarbon ene-haldrocarbon, i-hallogeneted methane, i-mpouroorocarbonbon, noma njengendawo ye-inorganic. I-Carbon Tetrafluoride iyigesi engenamibala futhi engenamonakalo, insoluble emanzini, incibilika e-benzene ne-chloroform. Uzinzile ngaphansi kokushisa okujwayelekile nengcindezi, gwema ama-oxidants aqinile, izinto ezivuthayo noma ezivuthayo. Igesi engavuthayo, ingcindezi yangaphakathi yesitsha izokwanda lapho kuvezwa ukushisa okuphezulu, futhi kunengozi yokuqhekeka nokuqhuma. Izinzile ngamakhemikhali futhi ayivuli. I-liquid kuphela i-ammonia-sodium metal realent engasebenza emazingeni okushisa asekamelweni. I-Carbon Tetrafluoride yigesi ebangela ukuba kube nomphumela wokushisa komhlaba. Kuzinzile kakhulu, kungahlala emkhathini isikhathi eside, futhi kuyinto enamandla kakhulu abamba ukushisa. I-Carbon Tetrafluoride isetshenziswa kwinqubo ye-plasma etching yemibuthano ehlukahlukene ehlanganisiwe. Iphinde isetshenziswe njengegesi ye-laser, futhi isetshenziswa eziqandeni zokushisa okuphansi, izixazululo, izinto zokugcoba, izinto zokufaka ezifaka izicelo, kanye namapholi wokuthola imithondo. Kuyinto esetshenziswa kakhulu i-plasma etching gesi embonini ye-microelectronics. Ingxube ye-tetrafluoromenethane ephezulu yokuhlanzana kanye ne-tetrafluoromethane igesi ebumsulwa. Ingasetshenziswa kabanzi eSilicon, eSilicon Dioxide, Silicon Nitride, ne-phosphosilicate ingilazi. I-etching yezinto zokwakha amafilimu ezifana neTungsten neTungsten nayo isetshenziswa kabanzi ekuhlanzeni komhlaba, ukukhiqizwa kwamaseli elanga, ubuchwepheshe be-lolar, ukuhlolwa okuphansi, nokuhlanza okuphrintiwe komjikelezo. Kusetshenziswe njenge-REFTICTION-LECTIVETE ENTSHERE ne-Plasma eyomile etching Technology yemibuthano ehlanganisiwe. Izindlela zokugcina Isitoreji: Gcina endaweni yokugcina epholile, evutha umoya ongavutha. Gwema kude nomlilo nemithombo yokushisa. Izinga lokushisa lesitoreji akufanele lidlule ku-30 ​​° C. Kufanele igcinwe ngokwahlukana kusuka ku-anchastibles (okuhlangene) nama-oxidants, futhi uvikele isitoreji esixubekile. Indawo yokugcina kufanele ifakwe ngemishini yokuvuza yokwelashwa okuvuzayo.

Isicelo:

①friji:

I-Tetrafluoromene kwesinye isikhathi isetshenziswa njengesiqandisi esiphansi sokushisa.

② Etching:

Isetshenziswa ku-elekthronikhi microcabrication yedwa noma inhlanganisela ngomoya-mpilo njenge-plasma etchant ye-silicon, eSilicon Dioxide, kanye neSilicon Nitride.

Iphakethe elijwayelekile:

Inzuzo:

Ukuhlanzeka ①igh, indawo yakamuva;

Umkhiqizi wesitifiketi se-Iso;

Ukulethwa kokufa;

Uhlelo lokuhlaziya umugqa we-④on-line lokulawulwa kwekhwalithi kuzo zonke izinyathelo;

Isidingo se-⑤Igh kanye nenqubo yokucophelela yokusingatha isilinda ngaphambi kokugcwaliswa;Sijwayele ukwenza umoya wethu we- "Innovation eletha inqubekela phambili, ikhwalithi ephezulu yokwenza imali ethile yokuziphilisa, yokuphatha ihembe ngemfudumalo e-semiconducturide embonini ye-Chon Tetrafluoride Cf4 igesi yansuku zonke yokuzingela ukubambisana futhi yakha okugqamile futhi kusasa.
Ukuthengisa okushisayoI-China CF4 Efriji, Isilinda kaphethiloli, Singumlingani wakho othembekile ezimakethe zamazwe omhlaba ezinezimpahla ezisezingeni eliphakeme. Izinzuzo zethu ziyinto emisha, ukuguquguquka kanye nokwethenjwa kwakhiwe phakathi neminyaka engamashumi amabili edlule. Sigxile ekunikezeni insizakalo yamakhasimende ethu njengento esemqoka ekuqiniseni ubudlelwano bethu besikhathi eside. Ukutholakala kwethu okuqhubekayo kwezixazululo eziphakeme zebanga eliphakathi nendawo nokuthengisa kwethu okuhle kwangaphambili nangemva kokuthengisa kuqinisekisa ukuncintisana okuqinile emakethe yomhlaba wonke owandayo.