Ukuthengiswa okushisayo kwefektri Priep Permity 99.999% I-Carbon Tetrafluoride CF4 igesi ye-Simconductor Imboni etching

Manje sinabasebenzisi abaningi abasebenzi abasezingeni eliphezulu kakhulu kumakethi we-Intanethi, i-QC, futhi basebenza nezinhlobo zenkinga eziyinkimbinkimbi ngaphakathi kwendlela yokukhiqiza ye-CF4 igesi ye-Simconductor Permivery Photined, yamukeleke ngemfudumalo! Sizoqhubeka nokuhlinzeka ngomkhiqizo ngekhwalithi ephezulu nentengo yokuncintisana.
Manje sinabasebenzisi abaningi abasebenzi abasezingeni eliphezulu kakhulu ngabasebenzisi be-Intanethi, i-QC, kanye nokusebenza nezinhlobo zenkinga eziyinkimbinkimbi ngaphakathi kwendlela yokukhiqiza yeChina CF4 igesi kanye ne-carbon tetrafluoride gesi, Ngemuva kweminyaka 'edala futhi ethuthuka, ngezinzuzo zamathalente aqeqeshiwe aqeqeshiwe kanye nokuhlangenwe nakho okucebile kokumaketha, izimpumelelo ezinhle kakhulu zenziwa kancane kancane. Sithola idumela elihle kusuka kumakhasimende ngenxa yemikhiqizo yethu emihle nensizakalo enhle ngemuva kokuthengiswa. Sifisa ngobuqotho ukudala ikusasa elichumayo nelichumayo kanye nabo bonke abangane ekhaya nakwamanye amazwe!

Amapharamitha Ezobuchwepheshe

I-Carbon Tetrafluoride iyi-hydrocarbon ene-halogenated ngefomula yamakhemikhali CF4. Kungathathwa njenge-hydrocarbon ene-haldrocarbon, i-hallogeneted methane, i-mpouroorocarbonbon, noma njengendawo ye-inorganic. I-Carbon Tetrafluoride iyigesi engenamibala futhi engenamonakalo, insoluble emanzini, incibilika e-benzene ne-chloroform. Uzinzile ngaphansi kokushisa okujwayelekile nengcindezi, gwema ama-oxidants aqinile, izinto ezivuthayo noma ezivuthayo. Igesi engavuthayo, ingcindezi yangaphakathi yesitsha izokwanda lapho kuvezwa ukushisa okuphezulu, futhi kunengozi yokuqhekeka nokuqhuma. Izinzile ngamakhemikhali futhi ayivuli. I-liquid kuphela i-ammonia-sodium metal realent engasebenza emazingeni okushisa asekamelweni. I-Carbon Tetrafluoride yigesi ebangela ukuba kube nomphumela wokushisa komhlaba. Kuzinzile kakhulu, kungahlala emkhathini isikhathi eside, futhi kuyinto enamandla kakhulu abamba ukushisa. I-Carbon Tetrafluoride isetshenziswa kwinqubo ye-plasma etching yemibuthano ehlukahlukene ehlanganisiwe. Iphinde isetshenziswe njengegesi ye-laser, futhi isetshenziswa eziqandeni zokushisa okuphansi, izixazululo, izinto zokugcoba, izinto zokufaka ezifaka izicelo, kanye namapholi wokuthola imithondo. Kuyinto esetshenziswa kakhulu i-plasma etching gesi embonini ye-microelectronics. Ingxube ye-tetrafluoromenethane ephezulu yokuhlanzana kanye ne-tetrafluoromethane igesi ebumsulwa. Ingasetshenziswa kabanzi eSilicon, eSilicon Dioxide, Silicon Nitride, ne-phosphosilicate ingilazi. I-etching yezinto zokwakha amafilimu ezifana neTungsten neTungsten nayo isetshenziswa kabanzi ekuhlanzeni komhlaba, ukukhiqizwa kwamaseli elanga, ubuchwepheshe be-lolar, ukuhlolwa okuphansi, nokuhlanza okuphrintiwe komjikelezo. Kusetshenziswe njenge-REFTICTION-LECTIVETE ENTSHERE ne-Plasma eyomile etching Technology yemibuthano ehlanganisiwe. Izindlela zokugcina Isitoreji: Gcina endaweni yokugcina epholile, evutha umoya ongavutha. Gwema kude nomlilo nemithombo yokushisa. Izinga lokushisa lesitoreji akufanele lidlule ku-30 ​​° C. Kufanele igcinwe ngokwahlukana kusuka ku-anchastibles (okuhlangene) nama-oxidants, futhi uvikele isitoreji esixubekile. Indawo yokugcina kufanele ifakwe ngemishini yokuvuza yokwelashwa okuvuzayo.

Isicelo:

①friji:

I-Tetrafluoromene kwesinye isikhathi isetshenziswa njengesiqandisi esiphansi sokushisa.

② Etching:

Isetshenziswa ku-elekthronikhi microcabrication yedwa noma inhlanganisela ngomoya-mpilo njenge-plasma etchant ye-silicon, eSilicon Dioxide, kanye neSilicon Nitride.

Iphakethe elijwayelekile:

Inzuzo:

Ukuhlanzeka ①igh, indawo yakamuva;

Umkhiqizi wesitifiketi se-Iso;

Ukulethwa kokufa;

Uhlelo lokuhlaziya umugqa we-④on-line lokulawulwa kwekhwalithi kuzo zonke izinyathelo;

Isidingo se-⑤Igh kanye nenqubo yokucophelela yokusingatha isilinda ngaphambi kokugcwaliswa;Manje sinabasebenzisi abaningi abasebenzi abasezingeni eliphezulu kakhulu kumakethi we-Intanethi, i-QC, futhi basebenza nezinhlobo zenkinga eziyinkimbinkimbi ngaphakathi kwendlela yokukhiqiza ye-CF4 igesi ye-Simconductor Permivery Photined, yamukeleke ngemfudumalo! Sizoqhubeka nokuhlinzeka ngomkhiqizo ngekhwalithi ephezulu nentengo yokuncintisana.
Ifektri Yokuthengisa OkushisayoChina CF4 igesi kanye ne-carbon tetrafluoride gesi, Ngemuva kweminyaka 'edala futhi ethuthuka, ngezinzuzo zamathalente aqeqeshiwe aqeqeshiwe kanye nokuhlangenwe nakho okucebile kokumaketha, izimpumelelo ezinhle kakhulu zenziwa kancane kancane. Sithola idumela elihle kusuka kumakhasimende ngenxa yemikhiqizo yethu emihle nensizakalo enhle ngemuva kokuthengiswa. Sifisa ngobuqotho ukudala ikusasa elichumayo nelichumayo kanye nabo bonke abangane ekhaya nakwamanye amazwe!